LabRunr Instructions: Difference between revisions

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(Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = LabRunr |HeaderColor = #FFFFFF |ImageOne = Mask-Aligner_Suss-MicroTec-MA6-BA6.jpg |ImageTwo = Instrument-Image.jpg |InstrumentType = Lithography |RoomLocation = B217 Steele |LabPhone = 626-395-1535 |PrimaryStaff = Alireza Ghaffari |StaffEmail = ghaffari@caltech.edu |StaffPhone = 626-395-3984 |Manufacturer = Suss MicroTec |Model = MA6 & MA6/BA6 |Techniques = Frontside Alignment,<br>Backside Alig...")
 
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== Description ==
LabRunr is a  utility  / web  server / database manager used for the scheduling and billing of KNI tools and lab use time.  It  consists  of  two  main  components:   
#The  web-facing  user  interface,  where  users  can make and cancel reservations,  check the live view of the lab, check the daily view of the lab, and other functions.
#Lab-facing  interface  (officially  called  InLabRunr),  in  which  users access touchscreen computers inside the cleanroom to make and cancel reservations, start  and  stop  equipment  logins,  and  see  the  status  of  the  equipment.  It  is  a  means  to  allow  the  KNI administration to track when and by whom the equipment is being used. 
===Web-facing  user  interface===
LabRunr allows KNI members to schedule and reserve equipment inside the lab and remotely with a web interface.
====[https://labrunr.caltech.edu/Login_2.aspx?ref=(%2fHome.aspx) LabRunr Reservations] - Click on the link to login to LabRunr and schedule tool reservations.====
'''  For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
''  Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''
*Check the Wiki tool page in the SOP or LabRunr Reservation Rules section for the rules for each tool.
*You do not have access to make reservations when logged in:
#If you have been trained and qualified by the tool manager, email the tool manager to request your access be enabled.
#If you have not been trained, email the tool manager.  In the email include:
##The process you want to use on the tool.
##Your schedule or available times throughout the week. 
''The staff manager will need to schedule their availability, your availability and the tools availability when scheduling.''
'''NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.'''
*If unable to login or forgotten password, contact KNI administrator at kni@caltech.edu
====[https://labrunr.caltech.edu/LiveUsage_2.aspx LabRunr Live Usage]====
*Live Usage displays members that have scanned into the cleanroom and wet chemistry room.  It also displays systems that are running and who is logged into the tool.  ''Often used to locate members and where they may be working inside the cleanroom.''
====[https://labrunr.caltech.edu/DailyView.aspx LabRunr Daily View]====
*Displays LabRunr scheduled tool reservations.  Can be used for checking tool availability when multiple tools need to be scheduled.
===Lab-facing  interface also called  InLabRunr===
InLabRunr accurately documents lab and tool use time for administration accounting.
* Always scan into LabRunr when entering the lab B207.
** If your name does not appear on the LabRunr door monitor, notify a KNI staff member.
* Always scan out of LabRunr when exiting the lab B207.  Listen to the door monitor to verify you have logged out of the tools properly.
** If you forgot to STOP your session or forgot to START/STOP your session, contact the tool manager to update the system records so the billing records can be updated.  Email the tool manager and include the Date, Start, and Stop time for the tool used.
* START your session before using the tool. 
**This will unlock the system for your session and start the billing record.  If the system does not unlock after logging into LabRunr, follow the instruction in the "LabRunr Troubleshooting Instructions" listed in the Resources section below.
* STOP your session when you are finished. 
**This will end your session and lock the system.  Your session will be billed for the total time used on the system. 
*Always scan into LabRunr before entering the Wet Chemistry Room inside the cleanroom.
** If your name does not appear on the Wet Chemical Room door monitor, notify a KNI staff member.  It is okay to use the Wet Chemistry Room if your name does not appear on the monitor.
*Always scan out of LabRunr when leaving the Wet Chemistry Room.
== Resources ==
===[https://caltech.box.com/s/r154cwy4xi1dfte7m1rr6zpey54ru28b General Reservation Policy]=== 
This is the General Reservation Policy.  Check the tool Wiki page for any special reservation rules associated with that piece of equipment.
===[https://caltech.box.com/s/5vmevevsb9qww98reyr2yyh9f59xdli6 LabRunr Instructions] (Quick Guide PDF)===
===[https://caltech.box.com/s/hncj3ezgmumgw1irrptomkkfowby3joe LabRunr Troubleshooting Instructions]:  Follow these steps when the system will not unlock after logging into Labrunr.===
===[https://caltech.box.com/s/6lfhi1i91rhi1sod6zxh8zd2ygr949r5 LabRunr Interlock Box SOP]:  Detailed information on the Labrunr interlock box.===
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== Description ==
[[Image:Mask-Aligner_Suss-MicroTec-MA6.jpg|thumb|upright=1.12|Suss MicroTec model MA6 Mask Aligner (model MA6/BA6 is shown at the top of the infobox)]]
The contact mask aligner is a tool that enables front- and back-side alignment of photo masks to create structures as small as 500 nm on sample sizes up to 6 inches. These systems are ideally suited for rapid definition of sub-micron devices through contact printing, and enable the high-resolution alignment of several lithographic layers to define complex devices. They are typically used to define contacts and connections to the nanostructures that are defined using the KNI's other fabrication instruments (e.g. e-beam lithography). The MA6/BA6 is also configured to do bond aligning in support of the Suss Microtec SB6L Wafer Bonder.
===== Suss1 MA6/BA6 Applications =====
* Front Side Flood Exposure (no mask)
* Front Side Alignment & Exposure
* Back Side Alignment with Front Side Exposure
 
===== Suss2 MA6 Applications =====
* Front Side Alignment & Exposure
* Back Side Alignment with Front Side Exposure
 
== Resources ==
===== Equipment Data =====
* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]
===== SOPs & Troubleshooting =====
* [https://caltech.box.com/s/gkhncvqe25uccym7cs5aj0n00krbmnw1 General SOP & Troubleshooting]
* [https://caltech.box.com/s/bbk4f9vi6jerhi9fcqoqa78n5npkwxkr Lamp Change SOP]
* [https://caltech.box.com/s/mj01k4mxgsxbnctv3fayzaje1ph4bfop Lamp Re-Ignition SOP]
* [https://caltech.box.com/s/xq40xbslhezrn4dyrblsgxrojd21lb8g Suss 1 Lamp Re-Ignition Video]
* [https://caltech.box.com/s/f5f4z86p8v9i43nvs7ntbgkzrog44jpm Suss 2 Lamp Re-Ignition Video]
 
===== Optical Lithography Resources =====
* [[Optical Lithography Resources | Optical Lithography Resources Page]]
* [https://caltech.box.com/s/jsetuvrq4ec1alqvn25pz11kmtzuw8rc Laurell Spinner Cleaning SOP]
* [https://caltech.box.com/s/evjv6kciuamgl42moa8vug60dpc0gimp Laurell Spinner - Spinning Resist Video]
 
===== Process Recipes =====
* [https://lab.kni.caltech.edu/index.php/Process_Recipe_Library#Optical_Lithography Optical Lithography Photoresist Recipes]
 
===== Manufacturer Manuals =====
* [https://caltech.box.com/s/81h0w7viflquujpc960x76os52oinv1f Suss MA6/BA6 System Manual]
* [https://caltech.box.com/s/0bdk31f09vxui62c096lhaiguzgkc1cu Suss MA6/BA6 Brochure]
* [https://caltech.box.com/s/fxyqt4fkpb6x1c0li2l84wjose5x0wke Lamp Power Supply Manual]
* [https://caltech.box.com/s/e1b5co1cb4hwbu21ala3cnqt888tma7f Alignment Mark Suggestion Document]
 
== Specifications ==
===== Manufacturer Specifications =====
* Whole wafers 2” up to 6” can be loaded.
* Samples pieces up to 6”x6” square can be loaded.
* Samples up to 6mm thick can be loaded..
* Exposure Resolution:
::Soft Contact Mode = 1 - 2 um
::Hard Contact Mode = 1 um
::Soft Vacuum Contact Mode = 1 - 0.5 um
::Vacuum Contact Mode = 0.4 - 0.5 um
 
===== Suss 1 Exposure Settings =====
* Channel 1 is 365nm wavelength at 15 mW/cm2.
* Channel 2 is 405nm wavelength at 25 mW/cm2.
===== Suss 2 Exposure Settings =====
* Channel 1 is 365nm wavelength at 10 mW/cm2.
* Channel 2 is 405nm wavelength at 15 mW/cm2.
 
== Related Instrumentation in the KNI ==
===== Electron Beam Lithography =====
* [[EBPG 5200: 100 kV Electron Beam Lithography|EBPG 5200: 100 kV Electron Beam Lithography]]
* [[EBPG 5000+: 100 kV Electron Beam Lithography | EBPG 5000+: 100 kV Electron Beam Lithography]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta 200F: SEM with 1-30 kV Electron Beam Lithography]]
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | Tecnai TF-20: TEM & STEM with 80-200 kV Electron Beam Lithography]]
===== Ion Beam Lithography =====
* [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab: Helium (5-40 kV), Neon (5-35 kV) & Gallium (1-30 kV) Focused Ion Beam Lithography & Microscopy]]
===== Optical Lithography =====
* [[Wafer Stepper | i-Line Wafer Stepper: GCA model 6300]]
* [[CNI-PV 2.1: Nano Imprint Lithography | Nano Imprint Lithography: NILT CNI-PV 2.1]]
* [[DWL-66: Direct-Write Laser System | Direct-Write Laser System: Heidelberg Instruments DWL-66]]
* [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]]
* [[Optical Lithography Resources]]

Latest revision as of 18:31, 3 April 2025

Description

LabRunr is a utility / web server / database manager used for the scheduling and billing of KNI tools and lab use time. It consists of two main components:

  1. The web-facing user interface, where users can make and cancel reservations, check the live view of the lab, check the daily view of the lab, and other functions.
  2. Lab-facing interface (officially called InLabRunr), in which users access touchscreen computers inside the cleanroom to make and cancel reservations, start and stop equipment logins, and see the status of the equipment. It is a means to allow the KNI administration to track when and by whom the equipment is being used.

Web-facing user interface

LabRunr allows KNI members to schedule and reserve equipment inside the lab and remotely with a web interface.

LabRunr Reservations - Click on the link to login to LabRunr and schedule tool reservations.

For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling. Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.

  • Check the Wiki tool page in the SOP or LabRunr Reservation Rules section for the rules for each tool.
  • You do not have access to make reservations when logged in:
  1. If you have been trained and qualified by the tool manager, email the tool manager to request your access be enabled.
  2. If you have not been trained, email the tool manager. In the email include:
    1. The process you want to use on the tool.
    2. Your schedule or available times throughout the week.

The staff manager will need to schedule their availability, your availability and the tools availability when scheduling. NOTE: For EQUIPMENT TRAINING, contact the tool owner via Email for scheduling - DO NOT USE Labrunr - Training Sessions.

  • If unable to login or forgotten password, contact KNI administrator at kni@caltech.edu

LabRunr Live Usage

  • Live Usage displays members that have scanned into the cleanroom and wet chemistry room. It also displays systems that are running and who is logged into the tool. Often used to locate members and where they may be working inside the cleanroom.

LabRunr Daily View

  • Displays LabRunr scheduled tool reservations. Can be used for checking tool availability when multiple tools need to be scheduled.

Lab-facing interface also called InLabRunr

InLabRunr accurately documents lab and tool use time for administration accounting.

  • Always scan into LabRunr when entering the lab B207.
    • If your name does not appear on the LabRunr door monitor, notify a KNI staff member.
  • Always scan out of LabRunr when exiting the lab B207. Listen to the door monitor to verify you have logged out of the tools properly.
    • If you forgot to STOP your session or forgot to START/STOP your session, contact the tool manager to update the system records so the billing records can be updated. Email the tool manager and include the Date, Start, and Stop time for the tool used.
  • START your session before using the tool.
    • This will unlock the system for your session and start the billing record. If the system does not unlock after logging into LabRunr, follow the instruction in the "LabRunr Troubleshooting Instructions" listed in the Resources section below.
  • STOP your session when you are finished.
    • This will end your session and lock the system. Your session will be billed for the total time used on the system.
  • Always scan into LabRunr before entering the Wet Chemistry Room inside the cleanroom.
    • If your name does not appear on the Wet Chemical Room door monitor, notify a KNI staff member. It is okay to use the Wet Chemistry Room if your name does not appear on the monitor.
  • Always scan out of LabRunr when leaving the Wet Chemistry Room.

Resources

General Reservation Policy

This is the General Reservation Policy. Check the tool Wiki page for any special reservation rules associated with that piece of equipment.

LabRunr Instructions (Quick Guide PDF)

LabRunr Troubleshooting Instructions: Follow these steps when the system will not unlock after logging into Labrunr.

LabRunr Interlock Box SOP: Detailed information on the Labrunr interlock box.

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