Usage Rates: Difference between revisions

From the KNI Lab at Caltech
Jump to navigation Jump to search
No edit summary
 
(67 intermediate revisions by 2 users not shown)
Line 1: Line 1:
'''The rates below are valid beginning October 2018 and are subject to change.'''
'''Overview of KNI Lab User Fees''' <br>
''Rates below are valid beginning October 1, 2024 and are subject to change''


NOTE:
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A fees ("overhead"/IDC).
* Lab users do '''NOT''' incur lab fees during days or months of non-use
* Individual Tools listed below are charged by the hour or portion thereof.
* Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. Market prices are passed on to users and do not include Caltech F&A fees.


== Equipment Rates ==
'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access is granted.'''
{| class="wikitable" style="width: 75%;"
 
== Caltech & JPL Usage Rates ==
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do '''not''' include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.
 
{| class="wikitable" style="width: 90%;"
|-
!scope="col" style="text-align:left; width: 30%"| Equipment Name
!scope="col" style="text-align:center; width: 22%"| Lab Area
!scope="col" style="text-align:center; width: 12%" | Tier A Rate
!scope="col" style="text-align:center; width: 12%"| Tier A
!scope="col" style="text-align:center; width: 12%"| Tier B Rate
!scope="col" style="text-align:center; width: 12%" | Tier B
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $40/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 40 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $20/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 40 hours/month
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ and 5200 Electron Beam Writers
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $32.50/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 20 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $36.50/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours/month
|-
|-
!scope="col" style="text-align:left; width: 31%"| Name
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF
!scope="col" style="text-align:left; width: 18%"| Category
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; width: 16%"| Caltech Rate
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $140/hr
!scope="col" style="text-align:center; width: 19%"| JPL/Non-Caltech Acad/Govt Rate
!scope="col" style="text-align:center; width: 16%" | Corporate Rate**
{{UsageRateTableItem|
|EquipmentName = [[EBPG 5000+: 100 kV Electron Beam Lithography | EBPG 5000+]]
|EquipmentCategory = Lithography
|CaltechRate = 62.00
|JPLNonCaltechAcadGovtRate = 101.99
|CorporateRate = 152.99
}}
{{UsageRateTableItem|
|EquipmentName = [[EBPG 5200: 100 kV Electron Beam Lithography | EBPG 5200]]
|EquipmentCategory = Lithography
|CaltechRate = 62.00
|JPLNonCaltechAcadGovtRate = 101.99
|CorporateRate = 152.99
}}
{{UsageRateTableItem|
|EquipmentName = [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners]]
|EquipmentCategory = Lithography
|CaltechRate = 36.00
|JPLNonCaltechAcadGovtRate = 59.22
|CorporateRate = 88.83
}}
{{UsageRateTableItem|
|EquipmentName = [[DWL-66: Direct-Write Laser System | Direct-Write Laser System (DWL-66)]]
|EquipmentCategory = Lithography
|CaltechRate = 47.00
|JPLNonCaltechAcadGovtRate = 77.32
|CorporateRate = 115.97
}}
{{UsageRateTableItem|
|EquipmentName = [[Nanoscribe PPGT: Microscale 3D Printer | Nanoscribe (Microscale 3D Printer)]]
|EquipmentCategory = Lithography
|CaltechRate = 8.00
|JPLNonCaltechAcadGovtRate = 13.16
|CorporateRate = 19.74
}}
{{UsageRateTableItem|
|EquipmentName = [[CHA: Electron Beam Evaporator | Evaporator: Metals & Oxides (CHA)]]
|EquipmentCategory = Deposition
|CaltechRate = 24.00
|JPLNonCaltechAcadGovtRate = 39.48
|CorporateRate = 59.22
}}
{{UsageRateTableItem|
|EquipmentName =  [[Labline: Electron Beam Evaporator | Evaporator: Al, Au, Pt & Ti (Labline)]]
|EquipmentCategory = Deposition
|CaltechRate = 24.00
|JPLNonCaltechAcadGovtRate = 39.48
|CorporateRate = 59.22
}}
{{UsageRateTableItem|
|EquipmentName = [[ATC Orion 8: Chalcogenide Sputter System | Sputter: Chalcogenide Material]]
|EquipmentCategory = Deposition
|CaltechRate = 70.00
|JPLNonCaltechAcadGovtRate = 115.15
|CorporateRate = 172.73
}}
{{UsageRateTableItem|
|EquipmentName = [[ATC Orion 8: Dielectric Sputter System | Sputter: Dielectric Material]]
|EquipmentCategory = Deposition
|CaltechRate = 37.00
|JPLNonCaltechAcadGovtRate = 60.87
|CorporateRate = 91.30
}}
{{UsageRateTableItem|
|EquipmentName = [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD)]]
|EquipmentCategory = Deposition
|CaltechRate = 67.00
|JPLNonCaltechAcadGovtRate = 110.22
|CorporateRate = 165.32
}}
{{UsageRateTableItem|
|EquipmentName = [[Plasma-Enhanced Chemical Vapor Deposition (PECVD) | PECVD]]
|EquipmentCategory = Deposition
|CaltechRate = 67.00
|JPLNonCaltechAcadGovtRate = 110.22
|CorporateRate = 165.32
}}
{{UsageRateTableItem|
|EquipmentName = [[DRIE: Bosch & Cryo ICP-RIE for Silicon | Silicon Etcher (DRIE)]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ICP-RIE: III-V, Metal & Silicon Etcher| III-V, Metal & Silicon Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher | Silicon, III-V & Organics Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ICP-RIE: Dielectric Etcher | Dielectric Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[XeF2 Etcher for Silicon | XeF<sub>2</sub> Etcher for Silicon]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab He/Ne/Ga-FIB]]
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | Nova 600 SEM/Ga-FIB]]
|EquipmentCategory = Microscopy
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 SEM/EDS/WDS]]
|EquipmentCategory = Microscopy
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Sirion: SEM & EDS | Sirion SEM/EDS]]
|EquipmentCategory = Microscopy
|CaltechRate = 39.00
|JPLNonCaltechAcadGovtRate = 64.16
|CorporateRate = 96.23
}}
{{UsageRateTableItem|
|EquipmentName = [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta SEM/NPGS]]
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 39.00
|JPLNonCaltechAcadGovtRate = 64.16
|CorporateRate = 96.23
}}
{{UsageRateTableItem|
|EquipmentName = [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | Tecnai TF-30 TEM/STEM]]
|EquipmentCategory = Microscopy
|CaltechRate = 97.00
|JPLNonCaltechAcadGovtRate = 159.57
|CorporateRate = 239.35
}}
{{UsageRateTableItem|
|EquipmentName = [[Dimension Icon: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM)]]
|EquipmentCategory = Microscopy
|CaltechRate = 41.00
|JPLNonCaltechAcadGovtRate = 67.45
|CorporateRate = 101.17
}}
{{UsageRateTableItem|
|EquipmentName = [[Critical Point Dryer]]
|EquipmentCategory = Support Tools
|CaltechRate = 54.00
|JPLNonCaltechAcadGovtRate = 88.83
|CorporateRate = 133.25
}}
{{UsageRateTableItem|
|EquipmentName = [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces]]
|EquipmentCategory = Support Tools
|CaltechRate = 5.00
|JPLNonCaltechAcadGovtRate = 8.23
|CorporateRate = 12.34
}}
{{UsageRateTableItem|
|EquipmentName = Monthly Base Rate*
|EquipmentCategory = General Equipment*
|CaltechRate = 655.00*
|JPLNonCaltechAcadGovtRate = 1,077.48*
|CorporateRate = 1,616.21*
}}
|}
|}


==*Monthly Base Rate==
'''General Lab use is counted as time in the KNI cleanroom facility. It includes access to:'''
The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:
*Atomic Force Microscope
*Critical Point Dryer
*Electron Beam Evaporators
*Laser Interference Lithography System
*Mask Aligners
*Nanoscribe PPGT
*Parylene Coater
*PECVD
*Profilometer
*Rapid Thermal Processor
*Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
*Scanning Electron Microscopes (Quanta, Sirion)
*Scriber Breaker
*Spectroscopic Ellipsometer
*Tube Furnaces (Wet, Dry Oxide + Annealing)
*Wafer Bonder
*Wafer Stepper
*Wet Chemistry Room/general supplies
*Wire Bonder
*XeF2 Silicon Etcher
*Other tools not listed in the table above
 
'''Miscellaneous Rates'''
*Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
*Staff-approved full service work is $100/hr.
 
'''Example of Charges'''
 
A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:
 
(15 non-billable hours x $0/hr) + (30 combined EBL hours  @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)
 
The lab member's total October direct costs are $4,600.


Chemical Wet Benches, Tecnai TF-20 TEM, GCA 6300 Wafer Stepper, Scriber-Breaker, Spectroscopic Ellipsometer, Carbon Evaporator, O<sub>2</sub>/Ar Plasma Cleaner, Parylene Coater, Wafer Bonder, Wire Bonder, Electrical Probe Station, Rapid Thermal Processor, Profilometer, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (e.g. gowning, chemicals, equipment reservation software, etc).
==Overhead/Indirect Cost Rate==
The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%.
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.


==**Corporate Memberships==
==External/Corporate Memberships==


For full information on the KNI's corporate membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.
The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.
'''Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment.''' This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.

Latest revision as of 18:05, 16 January 2025

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2024 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
  • Lab users do NOT incur lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access is granted.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do not include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.

Equipment Name Lab Area Tier A Rate Tier A Tier B Rate Tier B
General Lab General KNI Lab Use* $40/hr Up to 40 hours/month $20/hr Over 40 hours/month
Raith EBPG 5000+ and 5200 Electron Beam Writers Electron Beam Lithography (EBL) $120/hr Up to 30 hours/month $60/hr Over 30 hours/month
Oxford FlexAl ALD/ALE System Deposition, Chemical Vapor $65/hr Up to 30 hours/month $32.50/hr Over 30 hours/month
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy, Focused Ion Beam (FIB) $73/hr Up to 20 hours/month $36.50/hr Over 20 hours/month
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy, Transmission Electron (TEM) $140/hr

General Lab use is counted as time in the KNI cleanroom facility. It includes access to:

  • Atomic Force Microscope
  • Critical Point Dryer
  • Electron Beam Evaporators
  • Laser Interference Lithography System
  • Mask Aligners
  • Nanoscribe PPGT
  • Parylene Coater
  • PECVD
  • Profilometer
  • Rapid Thermal Processor
  • Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
  • Scanning Electron Microscopes (Quanta, Sirion)
  • Scriber Breaker
  • Spectroscopic Ellipsometer
  • Tube Furnaces (Wet, Dry Oxide + Annealing)
  • Wafer Bonder
  • Wafer Stepper
  • Wet Chemistry Room/general supplies
  • Wire Bonder
  • XeF2 Silicon Etcher
  • Other tools not listed in the table above

Miscellaneous Rates

  • Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
  • Staff-approved full service work is $100/hr.

Example of Charges

A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:

(15 non-billable hours x $0/hr) + (30 combined EBL hours @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)

The lab member's total October direct costs are $4,600.

Overhead/Indirect Cost Rate

The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%. Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.

External/Corporate Memberships

The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.

Retrieved from "https://lab.kni.caltech.edu/index.php?title=Usage_Rates&oldid=3556"