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'''Overview of KNI Lab User Fees''' <br>
'''Overview of KNI Lab User Fees''' <br>
''Note: Rates below are valid beginning October 1, 2020 and are subject to change''
''Rates below are valid beginning October 1, 2024 and are subject to change''


* Fees are incurred on a pay-as-you-go basis. (tools are charged by the hour or portion thereof)
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during calendar months of non-use.
* Lab users do '''NOT''' incur lab fees during days or months of non-use


== Caltech Academic Usage Rates ==
'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access is granted.'''
Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. '''*NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,000.'''


{| class="wikitable" style="width: 75%;"
== Caltech & JPL Usage Rates ==
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do '''not''' include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.
 
{| class="wikitable" style="width: 90%;"
|-
|-
!scope="col" style="text-align:left; width: 50%"| Equipment Name
!scope="col" style="text-align:left; width: 30%"| Equipment Name
!scope="col" style="text-align:center; width: 35%"| Lab Area
!scope="col" style="text-align:center; width: 22%"| Lab Area
!scope="col" style="text-align:center; width: 15%" | Hourly Rate
!scope="col" style="text-align:center; width: 12%" | Tier A Rate
!scope="col" style="text-align:center; width: 12%"| Tier A
!scope="col" style="text-align:center; width: 12%"| Tier B Rate
!scope="col" style="text-align:center; width: 12%" | Tier B
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Cleanroom Hourly Rate
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Cleanroom Use
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $28
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $40/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 40 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $20/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 40 hours/month
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Chalcogenide Sputter System
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ and 5200 Electron Beam Writers
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60/hr
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Orion UHV Dielectric Sputter System
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65/hr
|-
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 30 hours/month
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $32.50/hr
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Evaporation, Sputtering
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Bruker Dimension ICON AFM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam FIB/SEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $73/hr
|-
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 20 hours/month
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $36.50/hr
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours/month
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF  
!scope="col" style="text-align:center; background-color:#fec38d;" | Microscopy *Not Capped*
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $90
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $140/hr
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $79
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| XeF2 silicon etcher
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Etch
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $89
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#fec38d;" | Electron Beam Lithography *Not Capped*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $115
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5200 Electron Beam Writer
!scope="col" style="text-align:center; background-color:#fec38d;" | Electron Beam Lithography *Not Capped*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $115
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| GCA 6300 DSW Stepper
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Heidelberg DWL-66
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| NILT CNI-PV 2.1 Nanoimprint
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6 Aligner
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss Microtech MA6/BA6 Aligner
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Optical Lithography
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $62
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Dynatex GST-150 Scriber/Breaker
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Para Tech LabTop 3000 Parylene Coater
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Suss SB6L Wafer Bonder
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tousimis Critical Point Dryer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Dry Oxide + annealing
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Tystar Tytan Wet + Dry Oxide + annealing
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Westbond 7476D Wire Bonder
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Woolam M-2000 Spectroscopic Ellipsometer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Support & Misc Tools
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $44
|-
|}
|}


'''General Lab use is counted as time in the KNI cleanroom facility. It includes access to:'''
*Atomic Force Microscope
*Critical Point Dryer
*Electron Beam Evaporators
*Laser Interference Lithography System
*Mask Aligners
*Nanoscribe PPGT
*Parylene Coater
*PECVD
*Profilometer
*Rapid Thermal Processor
*Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
*Scanning Electron Microscopes (Quanta, Sirion)
*Scriber Breaker
*Spectroscopic Ellipsometer
*Tube Furnaces (Wet, Dry Oxide + Annealing)
*Wafer Bonder
*Wafer Stepper
*Wet Chemistry Room/general supplies
*Wire Bonder
*XeF2 Silicon Etcher
*Other tools not listed in the table above
'''Miscellaneous Rates'''
*Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
*Staff-approved full service work is $100/hr.
'''Example of Charges'''
A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:
(15 non-billable hours x $0/hr) + (30 combined EBL hours  @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)


'''FEE CAP EXCEPTIONS'''
The lab member's total October direct costs are $4,600.
*EBPG 5000+ and 5200 systems are not included in the quarterly academic/government rate cap. Actual hours will be billed.
*TF-30 STEM in Keck Building: Lab members who '''only''' use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use is not included in the quarterly academic/government rate cap. Actual hours will be billed.
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.


'''OVERHEAD FEE/INDIRECT COST'''
==Overhead/Indirect Cost Rate==
*Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2022 is 68.4%
The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%.
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.


==Corporate Memberships==
==External/Corporate Memberships==


For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.
The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.
'''Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment.''' This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.

Latest revision as of 18:05, 16 January 2025

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2024 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
  • Lab users do NOT incur lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access is granted.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the monthly usage thresholds listed below. Rates do not include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA award type. Lab invoices are issued on a monthly basis. Rates are valid beginning October 1, 2024 and are subject to change.

Equipment Name Lab Area Tier A Rate Tier A Tier B Rate Tier B
General Lab General KNI Lab Use* $40/hr Up to 40 hours/month $20/hr Over 40 hours/month
Raith EBPG 5000+ and 5200 Electron Beam Writers Electron Beam Lithography (EBL) $120/hr Up to 30 hours/month $60/hr Over 30 hours/month
Oxford FlexAl ALD/ALE System Deposition, Chemical Vapor $65/hr Up to 30 hours/month $32.50/hr Over 30 hours/month
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy, Focused Ion Beam (FIB) $73/hr Up to 20 hours/month $36.50/hr Over 20 hours/month
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy, Transmission Electron (TEM) $140/hr

General Lab use is counted as time in the KNI cleanroom facility. It includes access to:

  • Atomic Force Microscope
  • Critical Point Dryer
  • Electron Beam Evaporators
  • Laser Interference Lithography System
  • Mask Aligners
  • Nanoscribe PPGT
  • Parylene Coater
  • PECVD
  • Profilometer
  • Rapid Thermal Processor
  • Reactive Ion Etchers (Oxford III-V, Dielectric, 380)
  • Scanning Electron Microscopes (Quanta, Sirion)
  • Scriber Breaker
  • Spectroscopic Ellipsometer
  • Tube Furnaces (Wet, Dry Oxide + Annealing)
  • Wafer Bonder
  • Wafer Stepper
  • Wet Chemistry Room/general supplies
  • Wire Bonder
  • XeF2 Silicon Etcher
  • Other tools not listed in the table above

Miscellaneous Rates

  • Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.
  • Staff-approved full service work is $100/hr.

Example of Charges

A lab member logs 15 hours on the AJA e-beam evaporator, 20 hours on the Raith EBPG 5000+, and 20 hours on the Raith EBPG 5200, and a total of 10 hours of time in the cleanroom during the month of October. Based on the prices and thresholds listed above, the user costs are:

(15 non-billable hours x $0/hr) + (30 combined EBL hours @ $120/hr x 10 EBL hours @ $60/hr) + (10 hours of general lab time @ $40/hour)

The lab member's total October direct costs are $4,600.

Overhead/Indirect Cost Rate

The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2025 is 70%. Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.

External/Corporate Memberships

The KNI Lab is also open to industry and startup companies. Rates for companies differ from the posted rates (above) for our academic users. For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.