Usage Rates

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2023 and are subject to change

• Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
• Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access or further tool training is allowed.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2023 and are subject to change. Rates below apply to internal Caltech or JPL users.

Equipment Name	Lab Area	Hourly Rate
General Lab	General KNI Lab Use*	$35
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Oxford Dielectric System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$48
Oxford DRIE System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$48
Oxford III-V System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$48
Plasmatherm Reactive Ion Etch	Etch, Reactive Ion (RIE)	$48
Oxford FlexAl ALD/ALE System	Deposition, Chemical Vapor	$65
Oxford PECVD System 100	Deposition, Chemical Vapor	$65
AJA Chalcogenide Sputterer	Deposition, Physical	$30
AJA Dielectric Sputterer	Deposition, Physical	$35
AJA E-beam Evaporator	Deposition, Physical	$35
CHA MK40 E-Beam Evaporator	Deposition, Physical	$35
Lesker Labline E-Beam Evaporator	Deposition, Physical	$35
FEI Nova 600 Dualbeam Focused Ion Beam	Microscopy, Focused Ion Beam (FIB)	$70
Atomic Force Microscope	Microscopy, Atomic Force (AFM)	$15
Zeiss Orion NanoFab	Microscopy, Focused Ion Beam (FIB)	$73
FEI Nova 200 NanoLab Dualbeam SEM	Microscopy, Scanning Electron (SEM)	$37
FEI Quanta ESEM /NPGS	Microscopy, Scanning Electron (SEM)	$37
FEI Sirion FESEM	Microscopy, Scanning Electron (SEM)	$37
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF	Microscopy, Transmission Electron (TEM)	$140
Nanoscribe Photonic Professional GT	2D/3D Print	$12
3D Printer	2D/3D Print	$12

General Lab Use is counted as time in the KNI cleanroom facility. It includes access to: - Critical Point Dryer - Laser Interference Lithography System - Mask Aligners - Parylene Coater - Profilometer - Scriber Breaker - Spectroscopic Ellipsometer - Tube Furnaces (Wet, Dry Oxide + Annealing) - Wafer Bonder - Wafer Stepper - Wet Chemistry Room/general chemical supplies - Wire Bonder - XeF2 Silicon Etcher - TEM prep area (in Keck) - Other tools not listed in the table above

Miscellaneous Rates

• Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
• Dedicated KNI Staff Labor/Support for Research is $100/hr.

MONTHLY TIERED RATES Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.

Lab Area	Tier A	Tier A Hourly Rate	Tier B	Tier B Hourly Rate	Tier C	Tier C Hourly Rate
Electron Beam Lithography (EBL)	Up to 24 hours	$120	24-48 hours	$60	Over 48 hours	$0
Etch, Reactive Ion (RIE)	Up to 16 hours	$48	16-32 hours	$24	Over 32 hours	$0
Deposition, Chemical Vapor	Up to 24 hours	$65	24-48 hours	$32.50	Over 48 hours	$0
Deposition, Physical	Up to 16 hours	$35	16-32 hours	$17.50	Over 32 hours	$0
Microscopy, Atomic Force (AFM)	Up to 8 hours	$15	8-16 hours	$7.50	Over 16 hours	$0
Microscopy, Focused Ion Beam (FIB)	Up to 12 hours	$73	12-24 hours	$36.50	Over 24 hours	$0
Microscopy, Scanning Electron (SEM)	Up to 12 hours	$37	12-24 hours	$18.50	Over 24 hours	$0
Microscopy, Transmission Electron (TEM)	Up to 16 hours	$130	NA		NA
2D/3D Print	Up to 64 hours	$12	64-128 hours	$6	Over 128 hours	$0
General Lab Use	Up to 32 hours	$35	32-64 hours	$17.50	Over 64 hours	$0

Example: A lab member logs 35 cumulative hours on the Lesker e-beam evaporator and the AJA dielectric sputterer in the month of October. Based on the thresholds listed above for the "Physical Deposition" Area (which includes the Lesker and AJA tools), the costs are: (16 hours x $35) + (16 hours x $17.50) + (3 hours x $0) = $840 for 35 hours. During that same calendar month, the same user logs 60 total hours in the general KNI lab facility and 5 hours on the spectroscopic ellipsometer, which is included in the "General Lab" Area. Those costs are: (32 hours x $35) + (28 hours x $17.50) = $1,610 for 60 hours. The lab member's total October direct costs are $2,450.

OVERHEAD/INDIRECT COST RATE

• Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2024 is 70%.

Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.*

External/Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, purchase order, and an External Affiliate appointment. This process may take a few weeks before an external user is able to start in the KNI Lab.