Usage Rates

Overview of KNI Lab User Fees
Note: Rates below are valid beginning October 1, 2021 and are subject to change

• Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof)
• Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during calendar months of non-use

Caltech & JPL Usage Rates

Below is a table of hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2022 and are subject to change upon review at the end of FY23 Q2. Rates below apply to internal Caltech or JPL users.

Equipment Name	Lab Area	Hourly Rate
General Lab	General KNI Lab Use*	$37.50
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography (EBL)	$120
Oxford Dielectric System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$45
Oxford DRIE System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$45
Oxford III-V System 100 ICP/RIE	Etch, Reactive Ion (RIE)	$45
Plasmatherm Reactive Ion Etch	Etch, Reactive Ion (RIE)	$45
Oxford FlexAl ALD/ALE System	Deposition, Chemical Vapor	$60
Oxford PECVD System 100	Deposition, Chemical Vapor	$60
AJA Chalcogenide Sputterer	Deposition, Physical	$30
AJA Dielectric Sputterer	Deposition, Physical	$30
AJA E-beam Evaporator (estim. Dec arrival)	Deposition, Physical	$30
CHA MK40 E-Beam Evaporator	Deposition, Physical	$30
Lesker Labline E-Beam Evaporator	Deposition, Physical	$30
FEI Nova 600 Dualbeam Focused Ion Beam	Microscopy, Focused Ion Beam (FIB)	$70
Zeiss Orion NanoFab	Microscopy, Focused Ion Beam (FIB)	$70
FEI Nova 200 NanoLab Dualbeam FIB/SEM	Microscopy, Scanning Electron (SEM)	$35
FEI Quanta ESEM /NPGS	Microscopy, Scanning Electron (SEM)	$35
FEI Sirion FESEM	Microscopy, Scanning Electron (SEM)	$35
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF	Microscopy, Transmission Electron (TEM)	$130
Nanoscribe Photonic Professional GT	2D/3D Print	$15
3D Printer (TBA)	2D/3D Print	$15

General Lab Use includes the use of: Atomic Force Microscope (AFM), Critical Point Dryer, Laser Interference Lithography System, Mask Aligners, Parylene Coater, Profilometer, Scriber/Breaker, Spectroscopic Ellipsometer, TEM prep area (in Keck), Tube Furnaces (Wet, Dry Oxide + Annealing), Wafer Bonder, Wafer Stepper, Wet Chemistry Room/general chemical supplies, Wire Bonder, and XeF2 Silicon Etcher, as well as other tools not listed in the Lab Areas above.

Miscellaneous Rates

• Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
• Dedicated KNI Staff Labor/Support for Research is $100/hr.

MONTHLY TIERED RATES

OVERHEAD FEE/INDIRECT COST

• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2023 is 70%

Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.

Lab Area	Tier A	Tier A Hourly Rate	Tier B	Tier B Hourly Rate	Tier C	Tier C Hourly Rate
Electron Beam Lithography (EBL)	Up to 24 hours	$120	24-48 hours	$60	Over 48 hours	$0