Usage Rates

Overview of KNI Lab User Fees
Note: Rates below are valid beginning October 1, 2020 and are subject to change

• Fees are incurred on a pay-as-you-go basis. (tools are charged by the hour or portion thereof)
• Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during calendar months of non-use.

Caltech Academic Usage Rates

Below is a table of hourly rates for the equipment in the KNI Laboratory. Caltech/JPL users receive a quarterly fee cap for use of the cleanroom equipment in the KNI Lab. *NOTE:The maximum direct lab costs for cleanroom equipment that an individual Caltech/JPL user will be charged, per billing quarter, is $6,000.

Equipment Name	Lab Area	Hourly Rate
Cleanroom Hourly Rate	General KNI Cleanroom Use	$28
AJA Orion UHV Chalcogenide Sputter System	Evaporation, Sputtering	$62
AJA Orion UHV Dielectric Sputter System	Evaporation, Sputtering	$62
CHA MK40 E-Beam Evaporator	Evaporation, Sputtering	$62
Lesker Labline E-Beam Evaporator	Evaporation, Sputtering	$62
Bruker Dimension ICON AFM	Microscopy	$62
FEI Nova 200 NanoLab Dualbeam FIB/SEM	Microscopy	$62
FEI Nova 600 Dualbeam Focused Ion Beam	Microscopy	$62
FEI Quanta ESEM /NPGS	Microscopy	$62
FEI Sirion FESEM	Microscopy	$62
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF	Microscopy *Not Capped*	$90
Zeiss Orion NanoFab	Microscopy	$79
Oxford Dielectric System 100 ICP/RIE	Deposition, Etch	$89
Oxford DRIE System 100 ICP/RIE	Deposition, Etch	$89
Oxford FlexAl ALD System	Deposition, Etch	$89
Oxford III-V System 100 ICP/RIE	Deposition, Etch	$89
Oxford PECVD System 100	Deposition, Etch	$89
Plasmatherm Reactive Ion Etch	Deposition, Etch	$89
XeF2 silicon etcher	Deposition, Etch	$89
Raith EBPG 5000+ Electron Beam Writer	Electron Beam Lithography *Not Capped*	$115
Raith EBPG 5200 Electron Beam Writer	Electron Beam Lithography *Not Capped*	$115
GCA 6300 DSW Stepper	Optical Lithography	$62
Heidelberg DWL-66	Optical Lithography	$62
NILT CNI-PV 2.1 Nanoimprint	Optical Lithography	$62
Nanoscribe Photonic Professional GT	Optical Lithography	$62
Suss Microtech MA6 Aligner	Optical Lithography	$62
Suss Microtech MA6/BA6 Aligner	Optical Lithography	$62
Dynatex GST-150 Scriber/Breaker	Support & Misc Tools	$44
Para Tech LabTop 3000 Parylene Coater	Support & Misc Tools	$44
Suss SB6L Wafer Bonder	Support & Misc Tools	$44
Tousimis Critical Point Dryer	Support & Misc Tools	$44
Tystar Tytan Dry Oxide + annealing	Support & Misc Tools	$44
Tystar Tytan Wet + Dry Oxide + annealing	Support & Misc Tools	$44
Westbond 7476D Wire Bonder	Support & Misc Tools	$44
Woolam M-2000 Spectroscopic Ellipsometer	Support & Misc Tools	$44

FEE CAP EXCEPTIONS

• EBPG 5000+ and 5200 systems are not included in the quarterly academic/government rate cap. Actual hours will be billed.
• TF-30 STEM in Keck Building: Lab members who only use the TF-30 are exempt from paying the General Cleanroom hourly rate. TF-30 use is not included in the quarterly academic/government rate cap. Actual hours will be billed.
• Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
• Dedicated KNI Staff Labor/Support for Research is $100/hr.

OVERHEAD FEE/INDIRECT COST

• Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2022 is 68.4%

Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.