Process Recipe Library: Difference between revisions
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== Lithography Process Recipes == | == Lithography Process Recipes == | ||
===== Electron Beam Lithography ===== | ===== Electron Beam Lithography ===== | ||
* [https://caltech.box.com/ | * [https://caltech.app.box.com/file/549582924881 ZEP 520A resist spinning procedure (Caltech-only access)] | ||
===== Optical Lithography ===== | ===== Optical Lithography ===== | ||
* [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe] | * [https://caltech.box.com/s/5ls5rk4oanod66pfilsuendthutcmfqu AZ5214 resist spinning recipe] | ||
Revision as of 00:01, 8 November 2019
You can browse the available recipes below, by lab area. You can also browse directly within the KNI's folder directories:
- All Content (requires login with a caltech.edu email address)
- Publicly available content (no login required)