| Display title | File:Plasma-Therm-Dual-Chamber-RIE.jpg |
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| Namespace ID | 6 |
| Namespace | File |
| Page ID | 369 |
| Page content language | en - English |
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| Hash value | 47001d301b088c0c8b0b3d38f1d3f7eecf3f1050 |
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| Page creator | Matthew (talk | contribs) |
| Date of page creation | 00:16, 5 June 2019 |
| Latest editor | Matthew (talk | contribs) |
| Date of latest edit | 00:16, 5 June 2019 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
