| Display title | File:Dual-Chamber-RIE Plasma-Therm.jpg |
| Default sort key | Dual-Chamber-RIE Plasma-Therm.jpg |
| Page length (in bytes) | 0 |
| Namespace ID | 6 |
| Namespace | File |
| Page ID | 370 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Hash value | 888c27d0e18e91687e90b6f3b13b23b6f74697a8 |
| Edit | Allow all users (infinite) |
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| Page creator | Matthew (talk | contribs) |
| Date of page creation | 00:17, 5 June 2019 |
| Latest editor | Matthew (talk | contribs) |
| Date of latest edit | 06:02, 5 June 2019 |
| Total number of edits | 2 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
