Difference between revisions of "Wet Chemistry Resources"

From the KNI Lab at Caltech
Jump to navigation Jump to search
Line 3: Line 3:
=Sample Cleaning Resources=
=Sample Cleaning Resources=


https://cleanroom.byu.edu/clean
*[https://www.sciencedirect.com/book/9780323510844/handbook-of-silicon-wafer-cleaning-technology#book-description Handbook of Silicon Wafer Cleaning Technology]
 
*[https://www.microsi.com/silicon-wafer-cleaning/ UC Irvine Cleaning Procedures for Silicon]
 
*[https://cleanroom.byu.edu/clean BYU Substrate Cleaning Guide]
 
*https://www.microsi.com/silicon-wafer-cleaning/


==Solvent Cleans==
==Solvent Cleans==
Line 23: Line 29:


Recipe steps or links
Recipe steps or links
https://en.wikipedia.org/wiki/RCA_clean


===Piranha Etch===
===Piranha Etch===

Revision as of 11:39, 1 November 2019

Template:NOINDEX

Sample Cleaning Resources

Solvent Cleans

  • Acetone, IPA
    • Solvent for organics, IPA cleans remaining residues due to acetone's high evaporation rate
  • Acetone, Methanol
    • Similar to above except Methanol is more toxic, and a polar chemical versus IPA which is non-polar
  • Acetone, Methanol, IPA
  • Acetone, Methanol, IPA, DI Water
  • Remover PG (50°C), IPA
  • Dichloromethane, IPA
    • Caution, high evaporation rate may leave residue and beakers get quickly condense water/ice
  • Nanostrip?

Etching Cleans

RCA-1

Recipe steps or links

https://en.wikipedia.org/wiki/RCA_clean

Piranha Etch

HF Dip

Plasma Cleans

Wet Etching Resources

find etch list book and other links

Research Papers and Books

External Laboratories

also find alternative:

Commercial Materials


KNI Wet Etch Recipes Table

Table of Wet Etch recipes from KNI Papers

And general table from you, not from papers, maybe from recipes?

Material Etchant Rate (nm/min) Anisotropy Selective to Selectivity Origin and Notes
KNI CHA Al Al Etch Type D ~1000 Highly Al High Matches Transene's expected rate
KNI PECVD SiO2 HF ~1000 Highly SiO2 High measured 10/19
KNI PECVD SiN3 Ex ~1000 Highly SiN3 High measured 10/19
KNI PECVD a-Si KOH ~1000 Highly Si High Link to KNI member's research paper

Other Procedures

Liftoff

Electroplating

Safety Resources

Do we have materials to link to?

https://cleanroom.byu.edu/acid_safety

https://cleanroom.byu.edu/HF_safety

https://cleanroom.byu.edu/solvent_safety