Difference between revisions of "Usage Rates"

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The rates below are valid beginning October 2018 and are subject to change.
'''Overview of KNI Lab User Fees''' <br>
''Rates below are valid beginning October 1, 2022 and are subject to change''


NOTE:
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A (i.e. "overhead") fees.
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during days or months of non-use
* Individual Tools listed below are charged by the hour or portion thereof.
* Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. The market prices are passed on to users and do not include Caltech overhead.


== Equipment Rates ==
'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access or further tool training is allowed.'''
{| class="wikitable" style="width: 75%;"
 
== Caltech & JPL Usage Rates ==
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2022 and are subject to change upon review at the end of FY23 Q2.
Rates below apply to internal Caltech or JPL users.
 
{| class="wikitable" style="width: 80%;"
|-
!scope="col" style="text-align:left; width: 50%"| Equipment Name
!scope="col" style="text-align:center; width: 35%"| Lab Area
!scope="col" style="text-align:center; width: 15%" | Hourly Rate
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37.50
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Chalcogenide Sputterer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Dielectric Sputterer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA E-beam Evaporator (estim. Dec arrival)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam SEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $130
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 3D Printer (TBA)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
|}
 
'''General Lab Use is counted as time in the KNI cleanroom facility. It includes access to:'''
- Atomic Force Microscope (AFM)
- Critical Point Dryer
- Laser Interference Lithography System
- Mask Aligners
- Parylene Coater
- Profilometer
- Scriber Breaker
- Spectroscopic Ellipsometer
- Tube Furnaces (Wet, Dry Oxide + Annealing)
- Wafer Bonder
- Wafer Stepper
- Wet Chemistry Room/general chemical supplies
- Wire Bonder
- XeF2 Silicon Etcher
- TEM prep area (in Keck)
- Other tools not listed in the table above
 
'''Miscellaneous Rates'''
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.
 
'''MONTHLY TIERED RATES'''
Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.
 
{| class="wikitable" style="width: 90%;"
|-
!scope="col" style="text-align:left; width: 28%"| Lab Area
!scope="col" style="text-align:center; width: 12%"| Tier A
!scope="col" style="text-align:center; width: 12%" | Tier A Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier B
!scope="col" style="text-align:center; width: 12%" | Tier B Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier C
!scope="col" style="text-align:center; width: 12%" | Tier C Hourly Rate
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 24 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 24-48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $22.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 10 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 10-20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 10 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 10-20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $17.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $130
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 16-32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 50 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 50-100 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $7.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 100 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
|-
!scope="col" style="text-align:left; width: 31%"| Name
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab Use
!scope="col" style="text-align:left; width: 18%"| Category
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 32 hours
!scope="col" style="text-align:center; width: 16%"| Caltech Rate
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37.50
!scope="col" style="text-align:center; width: 19%"| JPL/Non-Caltech Acad/Govt Rate
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 32-64 hours
!scope="col" style="text-align:center; width: 16%" | Corporate Rate**
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $18.75
{{UsageRateTableItem|
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 64 hours
|EquipmentName = [[EBPG 5000+: 100 kV Electron Beam Lithography | EBPG 5000+]]
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|EquipmentCategory = Lithography
|CaltechRate = 62.00
|JPLNonCaltechAcadGovtRate = 101.99
|CorporateRate = 152.99
}}
{{UsageRateTableItem|
|EquipmentName = [[EBPG 5200: 100 kV Electron Beam Lithography | EBPG 5200]]
|EquipmentCategory = Lithography
|CaltechRate = 62.00
|JPLNonCaltechAcadGovtRate = 101.99
|CorporateRate = 152.99
}}
{{UsageRateTableItem|
|EquipmentName = [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners]]
|EquipmentCategory = Lithography
|CaltechRate = 36.00
|JPLNonCaltechAcadGovtRate = 59.22
|CorporateRate = 88.83
}}
{{UsageRateTableItem|
|EquipmentName = [[DWL-66: Direct-Write Laser System | Direct-Write Laser System (DWL-66)]]
|EquipmentCategory = Lithography
|CaltechRate = 47.00
|JPLNonCaltechAcadGovtRate = 77.32
|CorporateRate = 115.97
}}
{{UsageRateTableItem|
|EquipmentName = [[Nanoscribe PPGT: Microscale 3D Printer | Nanoscribe (Microscale 3D Printer)]]
|EquipmentCategory = Lithography
|CaltechRate = 8.00
|JPLNonCaltechAcadGovtRate = 13.16
|CorporateRate = 19.74
}}
{{UsageRateTableItem|
|EquipmentName = [[CHA: Electron Beam Evaporator | Evaporator: Metals & Oxides (CHA)]]
|EquipmentCategory = Deposition
|CaltechRate = 24.00
|JPLNonCaltechAcadGovtRate = 39.48
|CorporateRate = 59.22
}}
{{UsageRateTableItem|
|EquipmentName =  [[Labline: Electron Beam Evaporator | Evaporator: Al, Au, Pt & Ti (Labline)]]
|EquipmentCategory = Deposition
|CaltechRate = 24.00
|JPLNonCaltechAcadGovtRate = 39.48
|CorporateRate = 59.22
}}
{{UsageRateTableItem|
|EquipmentName = [[ATC Orion 8: Chalcogenide Sputter System | Sputter: Chalcogenide Material]]
|EquipmentCategory = Deposition
|CaltechRate = 70.00
|JPLNonCaltechAcadGovtRate = 115.15
|CorporateRate = 172.73
}}
{{UsageRateTableItem|
|EquipmentName = [[ATC Orion 8: Dielectric Sputter System | Sputter: Dielectric Material]]
|EquipmentCategory = Deposition
|CaltechRate = 37.00
|JPLNonCaltechAcadGovtRate = 60.87
|CorporateRate = 91.30
}}
{{UsageRateTableItem|
|EquipmentName = [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD)]]
|EquipmentCategory = Deposition
|CaltechRate = 67.00
|JPLNonCaltechAcadGovtRate = 110.22
|CorporateRate = 165.32
}}
{{UsageRateTableItem|
|EquipmentName = [[Plasma-Enhanced Chemical Vapor Deposition (PECVD) | PECVD]]
|EquipmentCategory = Deposition
|CaltechRate = 67.00
|JPLNonCaltechAcadGovtRate = 110.22
|CorporateRate = 165.32
}}
{{UsageRateTableItem|
|EquipmentName = [[DRIE: Bosch & Cryo ICP-RIE for Silicon | Silicon Etcher (DRIE)]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ICP-RIE: III-V, Metal & Silicon Etcher| III-V, Metal & Silicon Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher | Silicon, III-V & Organics Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ICP-RIE: Dielectric Etcher | Dielectric Etcher]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[XeF2 Etcher for Silicon | XeF<sub>2</sub> Etcher for Silicon]]
|EquipmentCategory = Etching
|CaltechRate = 50.00
|JPLNonCaltechAcadGovtRate = 82.25
|CorporateRate = 123.38
}}
{{UsageRateTableItem|
|EquipmentName = [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab He/Ne/Ga-FIB]]
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | Nova 600 SEM/Ga-FIB]]
|EquipmentCategory = Microscopy
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 SEM/EDS/WDS]]
|EquipmentCategory = Microscopy
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 160.39
}}
{{UsageRateTableItem|
|EquipmentName = [[Sirion: SEM & EDS | Sirion SEM/EDS]]
|EquipmentCategory = Microscopy
|CaltechRate = 39.00
|JPLNonCaltechAcadGovtRate = 64.16
|CorporateRate = 96.23
}}
{{UsageRateTableItem|
|EquipmentName = [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta SEM/NPGS]]
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 39.00
|JPLNonCaltechAcadGovtRate = 64.16
|CorporateRate = 96.23
}}
{{UsageRateTableItem|
|EquipmentName = [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | Tecnai TF-30 TEM/STEM]]
|EquipmentCategory = Microscopy
|CaltechRate = 97.00
|JPLNonCaltechAcadGovtRate = 159.57
|CorporateRate = 239.35
}}
{{UsageRateTableItem|
|EquipmentName = [[Dimension Icon: Atomic Force Microscope (AFM) | Atomic Force Microscope (AFM)]]
|EquipmentCategory = Microscopy
|CaltechRate = 41.00
|JPLNonCaltechAcadGovtRate = 67.45
|CorporateRate = 101.17
}}
{{UsageRateTableItem|
|EquipmentName = [[Critical Point Dryer]]
|EquipmentCategory = Support Tools
|CaltechRate = 54.00
|JPLNonCaltechAcadGovtRate = 88.83
|CorporateRate = 133.25
}}
{{UsageRateTableItem|
|EquipmentName = [[Tube Furnaces for Wet & Dry Processing | Tube Furnaces]]
|EquipmentCategory = Support Tools
|CaltechRate = 5.00
|JPLNonCaltechAcadGovtRate = 8.23
|CorporateRate = 12.34
}}
{{UsageRateTableItem|
|EquipmentName = Monthly Base Rate*
|EquipmentCategory = General Equipment*
|CaltechRate = 655.00*
|JPLNonCaltechAcadGovtRate = 1,077.48*
|CorporateRate = 1,616.21*
}}
|}
|}


==*Monthly Base Rate==
'''Example:'''
The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:
A lab member logs 25 cumulative hours on the Lesker e-beam evaporator and the AJA dielectric sputterer in the month of October. Based on the
thresholds listed above for the "Physical Deposition" Area (which includes the Lesker and AJA tools), the costs are:
(10 hours x $30) + (10 hours x $15) + (5 hours x $0) = $450 for 25 hours.
During that same calendar month, the same user logs 40 total hours in the general KNI lab facility and 5 hours on the spectroscopic ellipsometer,
which is included in the "General Lab" Area. Those costs are:
(32 hours x $37.50) + (8 hours x $18.75) = $1,350 for 40 hours.
The lab member's total October direct costs are $1,800.


Chemical Wet Benches, Tecnai TF-20 TEM, GCA 6300 Wafer Stepper, Scriber-Breaker, Spectroscopic Ellipsometer, Carbon Evaporator, O<sub>2</sub>/Ar Plasma Cleaner, Parylene Coater, Wafer Bonder, Wire Bonder, Electrical Probe Station, Rapid Thermal Processor, Profilometer, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (e.g. gowning, chemicals, equipment reservation software, etc).
==OVERHEAD/INDIRECT COST RATE==
*Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2023 is 70%.
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.*


==**Corporate Memberships==
==External/Corporate Memberships==


For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.
For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, purchase order, and an External Affiliate appointment. This process may take a few weeks before an external user is able to start in the KNI Lab.

Latest revision as of 21:09, 1 November 2022

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2022 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
  • Caltech/JPL/Academic or Government lab members are NOT charged any Lab fees during days or months of non-use

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access or further tool training is allowed.

Caltech & JPL Usage Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2022 and are subject to change upon review at the end of FY23 Q2. Rates below apply to internal Caltech or JPL users.

Equipment Name Lab Area Hourly Rate
General Lab General KNI Lab Use* $37.50
Raith EBPG 5000+ Electron Beam Writer Electron Beam Lithography (EBL) $120
Raith EBPG 5000+ Electron Beam Writer Electron Beam Lithography (EBL) $120
Oxford Dielectric System 100 ICP/RIE Etch, Reactive Ion (RIE) $45
Oxford DRIE System 100 ICP/RIE Etch, Reactive Ion (RIE) $45
Oxford III-V System 100 ICP/RIE Etch, Reactive Ion (RIE) $45
Plasmatherm Reactive Ion Etch Etch, Reactive Ion (RIE) $45
Oxford FlexAl ALD/ALE System Deposition, Chemical Vapor $60
Oxford PECVD System 100 Deposition, Chemical Vapor $60
AJA Chalcogenide Sputterer Deposition, Physical $30
AJA Dielectric Sputterer Deposition, Physical $30
AJA E-beam Evaporator (estim. Dec arrival) Deposition, Physical $30
CHA MK40 E-Beam Evaporator Deposition, Physical $30
Lesker Labline E-Beam Evaporator Deposition, Physical $30
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy, Focused Ion Beam (FIB) $70
Zeiss Orion NanoFab Microscopy, Focused Ion Beam (FIB) $70
FEI Nova 200 NanoLab Dualbeam SEM Microscopy, Scanning Electron (SEM) $35
FEI Quanta ESEM /NPGS Microscopy, Scanning Electron (SEM) $35
FEI Sirion FESEM Microscopy, Scanning Electron (SEM) $35
FEI Tecnai TF-30 TEM, STEM, EDS & HAADF Microscopy, Transmission Electron (TEM) $130
Nanoscribe Photonic Professional GT 2D/3D Print $15
3D Printer (TBA) 2D/3D Print $15

General Lab Use is counted as time in the KNI cleanroom facility. It includes access to: - Atomic Force Microscope (AFM) - Critical Point Dryer - Laser Interference Lithography System - Mask Aligners - Parylene Coater - Profilometer - Scriber Breaker - Spectroscopic Ellipsometer - Tube Furnaces (Wet, Dry Oxide + Annealing) - Wafer Bonder - Wafer Stepper - Wet Chemistry Room/general chemical supplies - Wire Bonder - XeF2 Silicon Etcher - TEM prep area (in Keck) - Other tools not listed in the table above

Miscellaneous Rates

  • Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
  • Dedicated KNI Staff Labor/Support for Research is $100/hr.

MONTHLY TIERED RATES Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.

Lab Area Tier A Tier A Hourly Rate Tier B Tier B Hourly Rate Tier C Tier C Hourly Rate
Electron Beam Lithography (EBL) Up to 24 hours $120 24-48 hours $60 Over 48 hours $0
Etch, Reactive Ion (RIE) Up to 15 hours $45 15-30 hours $22.50 Over 30 hours $0
Deposition, Chemical Vapor Up to 10 hours $60 10-20 hours $30 Over 20 hours $0
Deposition, Physical Up to 10 hours $30 10-20 hours $15 Over 20 hours $0
Microscopy, Focused Ion Beam (FIB) Up to 15 hours $70 15-30 hours $35 Over 30 hours $0
Microscopy, Scanning Electron (SEM) Up to 15 hours $35 15-30 hours $17.50 Over 30 hours $0
Microscopy, Transmission Electron (TEM) Up to 16 hours $130 16-32 hours $65 Over 32 hours $0
2D/3D Print Up to 50 hours $15 50-100 hours $7.50 Over 100 hours $0
General Lab Use Up to 32 hours $37.50 32-64 hours $18.75 Over 64 hours $0

Example: A lab member logs 25 cumulative hours on the Lesker e-beam evaporator and the AJA dielectric sputterer in the month of October. Based on the thresholds listed above for the "Physical Deposition" Area (which includes the Lesker and AJA tools), the costs are: (10 hours x $30) + (10 hours x $15) + (5 hours x $0) = $450 for 25 hours. During that same calendar month, the same user logs 40 total hours in the general KNI lab facility and 5 hours on the spectroscopic ellipsometer, which is included in the "General Lab" Area. Those costs are: (32 hours x $37.50) + (8 hours x $18.75) = $1,350 for 40 hours. The lab member's total October direct costs are $1,800.

OVERHEAD/INDIRECT COST RATE

  • Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2023 is 70%.

Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.*

External/Corporate Memberships

For information on the KNI corporate lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, purchase order, and an External Affiliate appointment. This process may take a few weeks before an external user is able to start in the KNI Lab.