Difference between revisions of "Usage Rates"

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!scope="col" style="text-align:left; width: 31%"| Name
!scope="col" style="text-align:left; width: 31%"| Name
!scope="col" style="text-align:center; width: 18%"| Category
!scope="col" style="text-align:left; width: 18%"| Category
!scope="col" style="text-align:center; width: 16%"| Caltech Rate
!scope="col" style="text-align:center; width: 16%"| Caltech Rate
!scope="col" style="text-align:center; width: 19%"| JPL/Non-Caltech Acad/Govt Rate
!scope="col" style="text-align:center; width: 19%"| JPL/Non-Caltech Acad/Govt Rate
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{{UsageRateTableItem|
{{UsageRateTableItem|
|EquipmentName = Atomic Force Microscope
|EquipmentName = He/Ne/Ga-FIB (ORION)
|EquipmentCategory = Microscopy
|CaltechRate = 41.00
|JPLNonCaltechAcadGovtRate = 67.45
|CorporateRate = 101.17
}}
{{UsageRateTableItem|
|EquipmentName = He/Ne/Ga-FIB w/ Multibeam Pattern Generator (Orion)
|EquipmentCategory = Microscopy, Lithography
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 65.00
|CaltechRate = 65.00
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{{UsageRateTableItem|
{{UsageRateTableItem|
|EquipmentName = SEM & EDS (Sirion)
|EquipmentName = SEM, Ga-FIB & Omniprobe (Nova 600)
|EquipmentCategory = Microscopy
|EquipmentCategory = Microscopy
|CaltechRate = 39.00
|CaltechRate = 65.00
|JPLNonCaltechAcadGovtRate = 64.16
|JPLNonCaltechAcadGovtRate = 106.93
|CorporateRate = 96.23
|CorporateRate = 160.39
}}
}}
{{UsageRateTableItem|
{{UsageRateTableItem|
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{{UsageRateTableItem|
{{UsageRateTableItem|
|EquipmentName = SEM, Ga-FIB, GIS & Omniprobe (Nova 600)
|EquipmentName = SEM & EDS (Sirion)
|EquipmentCategory = Microscopy
|EquipmentCategory = Microscopy
|CaltechRate = 65.00
|CaltechRate = 39.00
|JPLNonCaltechAcadGovtRate = 106.93
|JPLNonCaltechAcadGovtRate = 64.16
|CorporateRate = 160.39
|CorporateRate = 96.23
}}
}}
{{UsageRateTableItem|
{{UsageRateTableItem|
|EquipmentName = SEM Nanometer Pattern Generation System (Quanta)
|EquipmentName = SEM & NPGS (Quanta)
|EquipmentCategory = Microscopy, Lithography
|EquipmentCategory = Microscopy, Lithography
|CaltechRate = 39.00
|CaltechRate = 39.00
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|JPLNonCaltechAcadGovtRate = 159.57
|JPLNonCaltechAcadGovtRate = 159.57
|CorporateRate = 239.35
|CorporateRate = 239.35
}}
{{UsageRateTableItem|
|EquipmentName = Atomic Force Microscope (AFM)
|EquipmentCategory = Microscopy
|CaltechRate = 41.00
|JPLNonCaltechAcadGovtRate = 67.45
|CorporateRate = 101.17
}}
}}
{{UsageRateTableItem|
{{UsageRateTableItem|

Revision as of 17:15, 6 May 2019

The rates below are valid beginning October 2018 and are subject to change.

NOTE:

  • Rates for JPL, Non-Caltech Academic, Government, and Corporate KNI lab members are inclusive of FY19 Caltech F&A ("overhead") fees.
  • Individual Tools listed below are charged by the hour or portion thereof.
  • Precious Metal Usage (e.g. Au, Pt, etc.) is billed by the gram or portion thereof. The market prices are passed on to users and do not include Caltech overhead.

Equipment Rates

Name Category Caltech Rate JPL/Non-Caltech Acad/Govt Rate Corporate Rate**
Contact Mask Aligners
Lithography
$36.00
$59.22
$88.83
Direct-Write Laser System (DWL-66)
Lithography
$47.00
$77.32
$115.97
Electron Beam Pattern Generator (EBPG 5000+)
Lithography
$62.00
$101.99
$152.99
Electron Beam Pattern Generator (EBPG 5200)
Lithography
$62.00
$101.99
$152.99
Two-Photon Lithography ("Microscale 3D Printing")
Lithography
$8.00
$13.16
$19.74
Etcher: Dielectric Material ("380")
Etching
$50.00
$82.25
$123.38
Etcher: III/V Material, Metal & Silicon
Etching
$50.00
$82.25
$123.38
Etcher: Silicon (DRIE)
Etching
$50.00
$82.25
$123.38
Etcher: Silicon, III/V Material & Organics (RIE)
Etching
$50.00
$82.25
$123.38
Etcher: XeF2 for Silicon
Etching
$50.00
$82.25
$123.38
Atomic Layer Deposition
Deposition
$67.00
$110.22
$165.32
E-beam Evaporator: Metals Al, Au, Pt & Ti (Lesker Labline)
Deposition
$24.00
$39.48
$59.22
E-beam Evaporator: Metals & Oxides (CHA)
Deposition
$24.00
$39.48
$59.22
Plasma-Enhanced Chemical Vapor Deposition
Deposition
$67.00
$110.22
$165.32
Sputter: Chalcogenide Material
Deposition
$70.00
$115.15
$172.73
Sputter: Dielectric Material
Deposition
$37.00
$60.87
$91.30
He/Ne/Ga-FIB (ORION)
Microscopy, Lithography
$65.00
$106.93
$160.39
SEM, Ga-FIB & Omniprobe (Nova 600)
Microscopy
$65.00
$106.93
$160.39
SEM, EDS & WDS (Nova 200)
Microscopy
$65.00
$106.93
$160.39
SEM & EDS (Sirion)
Microscopy
$39.00
$64.16
$96.23
SEM & NPGS (Quanta)
Microscopy, Lithography
$39.00
$64.16
$96.23
TEM, STEM, EDS & HAADF (TF-30)
Microscopy
$97.00
$159.57
$239.35
Atomic Force Microscope (AFM)
Microscopy
$41.00
$67.45
$101.17
Critical Point Dryer
Support Tools
$54.00
$88.83
$133.25
Tube Furnaces
Support Tools
$5.00
$8.23
$12.34
Monthly Base Rate*
General Equipment*
$655.00
$1,077.48
$1,616.21

*Monthly Base Rate

The Monthly Base Rate is a flat fee charged per user, per month. It includes the use of:

Profilometers, Chemical Wet Benches, Dynatex GST-150 Scriber Breaker, J.A. Woolam Spectroscopic Ellipsometer M-2000, TF20 TEM, GCA 6300 Stepper, Rapid Thermal Processor, Paratech Parylene Coater, Suss SB6L Wafer Bonder, Westbond Wire Bonder, additional optical microscopes, related metrology, miscellaneous support tools and general supplies (gowning, chemicals, equipment reservation software, etc.).

**Corporate Memberships

For full information on the KNI's corporate membership plan, please send an email to tkimoto@caltech.edu with details regarding: the number of people looking to join as KNI lab members, equipment needs, anticipated start date, and information about the company. Startup companies may qualify for limited-term reduced rates.