Difference between revisions of "Tube Furnaces for Wet & Dry Processing"
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|InstrumentName = Tystar Tytan Tube Furnaces 1 & 2 | |InstrumentName = Tystar Tytan Tube Furnaces 1 & 2 | ||
|HeaderColor = #E6E7E8 | |HeaderColor = #E6E7E8 | ||
|ImageOne = | |ImageOne = Tystar-Tytan-Tube-Furnaces.jpg | ||
|ImageTwo = | |ImageTwo = | ||
|InstrumentType = [[Equipment_List# | |InstrumentType = [[Equipment_List#Thermal_Processing|Thermal Processing]] | ||
|RoomLocation = | |RoomLocation = B235 Steele | ||
|LabPhone = 626-395-1532 | |LabPhone = 626-395-1532 | ||
|PrimaryStaff = [[Nathan S. Lee]] | |PrimaryStaff = [[Nathan S. Lee]] | ||
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|StaffPhone = 626-395-1319 | |StaffPhone = 626-395-1319 | ||
|Manufacturer = Tystar Corporation | |Manufacturer = Tystar Corporation | ||
|Model = | |Model = Tytan Horizontal<br>Diffusion Furnace | ||
|Techniques = Oxidation | |Techniques = Oxidation, Annealing | ||
|EmailList = kni-tystar@caltech.edu | |EmailList = kni-tystar@caltech.edu | ||
|EmailListName = | |EmailListName = Tystar | ||
}} | }} | ||
== Description == | == Description == | ||
The system is designed for processing up to | The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing. | ||
===== Applications ===== | ===== Applications ===== | ||
* Dry | * Dry & Wet oxidation | ||
* Annealing | * Annealing | ||
== Resources == | == Resources == | ||
===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
* [https://caltech.box.com/s/ | * [https://caltech.box.com/s/BROKEN KNI SOP (Coming Soon)] | ||
Revision as of 21:44, 27 May 2019
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Description
The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.
Applications
- Dry & Wet oxidation
- Annealing