Dektak 3ST: Profilometer

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Veeco Dektak 3ST Profilometer
Dektak-3ST-Profilometer.jpg
Instrument Type Microscopy
Techniques Surface Profiling
Staff Manager Alex Wertheim
Staff Email alexw@caltech.edu
Staff Phone 626-395-3371
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Lab Location
Lab Phone 626-395-1539
Manufacturer Veeco
Model Dektak 3ST

Description

The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

Applications
  • Surface Profiling

Resources

SOPs