Dektak 3ST: Profilometer: Difference between revisions

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===== SOPs =====
===== SOPs =====
* [ KNI SOP]
* [ KNI SOP]
== Related Instrumentation in the KNI ==
===== Scanning Probe Microscopes =====
* [[Dimension Icon: Atomic Force Microscope (AFM) | Dimension Icon: Atomic Force Microscope (AFM)]]
* [[Dektak 3ST: Profilometer | Dektak 3ST: Profilometer]]

Revision as of 00:01, 12 September 2019

Veeco Dektak 3ST Profilometer
Instrument Type Metrology
Techniques Surface Profiling
Staff Manager Alex Wertheim
Staff Email
Staff Phone 626-395-3371
Reserve time on LabRunr
Request training by email
Lab Location B235 Steele
Lab Phone 626-395-1539
Manufacturer Veeco
Model Dektak 3ST


The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm in height can be determined with some approximation.

  • Surface Profiling



Related Instrumentation in the KNI

Scanning Probe Microscopes