XeF2 Etcher for Silicon - Revision history

Tkimoto at 18:42, 8 October 2025

2025-10-08T18:42:29Z

← Older revision		Revision as of 18:42, 8 October 2025
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	\|RoomLocation = B235C Steele		\|RoomLocation = B235C Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539
	\|PrimaryStaff = [[~~Kelly McKenzie~~]]		\|PrimaryStaff = [[Alex Wertheim]]
	\|StaffEmail = ~~kmmckenz~~@caltech.edu		\|StaffEmail = alexw@caltech.edu
	\|StaffPhone = 626-395-~~5732~~		\|StaffPhone = 626-395-3371
	\|Manufacturer = N/A		\|Manufacturer = N/A
	\|Model = N/A		\|Model = N/A

Derose at 19:17, 29 June 2024

2024-06-29T19:17:42Z

← Older revision		Revision as of 19:17, 29 June 2024
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	\|RoomLocation = B235C Steele		\|RoomLocation = B235C Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539
	\|PrimaryStaff = [[~~Alireza Ghaffari~~]]		\|PrimaryStaff = [[Kelly McKenzie]]
	\|StaffEmail = ~~alireza~~@caltech.edu		\|StaffEmail = kmmckenz@caltech.edu
	\|StaffPhone = 626-395-~~3984~~		\|StaffPhone = 626-395-5732
	\|Manufacturer = N/A		\|Manufacturer = N/A
	\|Model = N/A		\|Model = N/A
	\|Techniques = Selective dry Si etching		\|Techniques = Selective dry Si etching
	\|RequestTraining = ~~alireza~~@caltech.edu		\|RequestTraining = kmmckenz@caltech.edu
	\|EmailList = kni-XeF2		\|EmailList = kni-XeF2
	\|EmailListName = XeF<sub>2</sub>		\|EmailListName = XeF<sub>2</sub>

Sydney: Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T22:56:28Z

Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 22:56, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select XeF2 from the dropdown menu)

	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]		* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]

Derose at 21:03, 12 May 2023

2023-05-12T21:03:00Z

← Older revision		Revision as of 21:03, 12 May 2023
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	\|RoomLocation = B235C Steele		\|RoomLocation = B235C Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539
	\|PrimaryStaff = [[~~Alex Wertheim~~]]		\|PrimaryStaff = [[Alireza Ghaffari]]
	\|StaffEmail = ~~alexw~~@caltech.edu		\|StaffEmail = alireza@caltech.edu
	\|StaffPhone = 626-395-~~3371~~		\|StaffPhone = 626-395-3984
	\|Manufacturer = N/A		\|Manufacturer = N/A
	\|Model = N/A		\|Model = N/A
	\|Techniques = Selective dry Si etching		\|Techniques = Selective dry Si etching
	\|RequestTraining = ~~alexw~~@caltech.edu		\|RequestTraining = alireza@caltech.edu
	\|EmailList = kni-XeF2		\|EmailList = kni-XeF2
	\|EmailListName = XeF<sub>2</sub>		\|EmailListName = XeF<sub>2</sub>

Derose: /* Equipment Data */

2022-06-30T05:33:17Z

Equipment Data

← Older revision		Revision as of 05:33, 30 June 2022
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	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/y0oiacrryzcrxv6so2p6d4zpysvj48cf Etching Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select XeF2 from the dropdown menu)

	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]		* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]

Derose: /* Resources */

2020-08-02T05:03:38Z

Resources

← Older revision		Revision as of 05:03, 2 August 2020
Line 25:		Line 25:

	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/y0oiacrryzcrxv6so2p6d4zpysvj48cf Etching Pass-down equipment information]
	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]		* [https://caltech.box.com/s/2zf5dwmdjyjxptvoscxkxe6yt57vr85v KNI SOP]

Jpalmer at 21:47, 20 February 2020

2020-02-20T21:47:01Z

← Older revision		Revision as of 21:47, 20 February 2020
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	\|Techniques = Selective dry Si etching		\|Techniques = Selective dry Si etching
	\|RequestTraining = alexw@caltech.edu		\|RequestTraining = alexw@caltech.edu
	\|EmailList = kni-XeF2~~@caltech.edu~~		\|EmailList = kni-XeF2
	\|EmailListName = XeF<sub>2</sub>		\|EmailListName = XeF<sub>2</sub>
	}}		}}

Matthew at 21:11, 27 May 2019

2019-05-27T21:11:56Z

← Older revision		Revision as of 21:11, 27 May 2019
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	\|ImageTwo =		\|ImageTwo =
	\|InstrumentType = [[Equipment_List#Etching\|Etching]]		\|InstrumentType = [[Equipment_List#Etching\|Etching]]
	\|RoomLocation =		\|RoomLocation = B235C Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539
	\|PrimaryStaff = [[Alex Wertheim]]		\|PrimaryStaff = [[Alex Wertheim]]

Matthew at 21:08, 27 May 2019

2019-05-27T21:08:42Z

← Older revision		Revision as of 21:08, 27 May 2019
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	{{InstrumentInfoboxOneImage\|		{{InstrumentInfoboxOneImage\|
	\|InstrumentName = XeF<sub>2</sub> Silicon Etcher		\|InstrumentName = XeF<sub>2</sub> Silicon Etcher
	\|HeaderColor = #~~F5A81C~~		\|HeaderColor = #FFE2B9
	\|ImageOne = XeF2-Etcher.jpg		\|ImageOne = XeF2-Etcher.jpg
	\|ImageTwo =		\|ImageTwo =
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	}}		}}
	== Description ==		== Description ==
	The XeF<sub>2</sub> etcher flows pressure and time controlled pulses of XeF<sub>2</sub> gas into a chamber to deliver an isotropic etch ~~which~~ is highly selective only to ~~Silicon~~. It is commonly used to remove Si under layers accessed through ~~Vias~~ to suspend membranes and other structures in MEMS devices.		The XeF<sub>2</sub> etcher flows pressure- and time-controlled pulses of XeF<sub>2</sub> gas into a chamber to deliver an isotropic etch that is highly selective only to silicon. It is commonly used to remove Si under layers that are accessed through vias, in order to suspend membranes and other structures in MEMS devices.

	===== Applications =====		===== Applications =====

Matthew at 00:54, 21 May 2019

2019-05-21T00:54:57Z

← Older revision		Revision as of 00:54, 21 May 2019
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	\|RequestTraining = alexw@caltech.edu		\|RequestTraining = alexw@caltech.edu
	\|EmailList = kni-XeF2@caltech.edu		\|EmailList = kni-XeF2@caltech.edu
	\|EmailListName = ~~XeF2~~		\|EmailListName = XeF<sub>2</sub>
	}}		}}
	== Description ==		== Description ==