Wafer Stepper - Revision history

Tkimoto at 18:43, 14 April 2026

2026-04-14T18:43:32Z

← Older revision		Revision as of 18:43, 14 April 2026
Line 7:		Line 7:
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-3423		\|LabPhone = 626-395-3423
	\|PrimaryStaff = [[Guy DeRose]]		\|PrimaryStaff = [[Guy A. DeRose, PhD]]
	\|StaffEmail = derose@caltech.edu		\|StaffEmail = derose@caltech.edu
	\|StaffPhone = 626-395-3423		\|StaffPhone = 626-395-3423

Tkimoto at 18:43, 14 April 2026

2026-04-14T18:43:06Z

← Older revision		Revision as of 18:43, 14 April 2026
Line 6:		Line 6:
	\|InstrumentType = [[Equipment_List#Lithography\|Lithography]]		\|InstrumentType = [[Equipment_List#Lithography\|Lithography]]
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-~~1536~~		\|LabPhone = 626-395-3423
	\|PrimaryStaff = [[~~Nathan S. Lee~~]]		\|PrimaryStaff = [[Guy DeRose]]
	\|StaffEmail = ~~nathslee~~@caltech.edu		\|StaffEmail = derose@caltech.edu
	\|StaffPhone = 626-395-~~4386~~		\|StaffPhone = 626-395-3423
	\|Manufacturer = GCA		\|Manufacturer = GCA
	\|Model = 6300		\|Model = 6300

Tkimoto at 00:28, 16 July 2025

2025-07-16T00:28:03Z

← Older revision		Revision as of 00:28, 16 July 2025
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	\|PrimaryStaff = [[Nathan S. Lee]]		\|PrimaryStaff = [[Nathan S. Lee]]
	\|StaffEmail = nathslee@caltech.edu		\|StaffEmail = nathslee@caltech.edu
	\|StaffPhone = 626-395-~~3423~~		\|StaffPhone = 626-395-4386
	\|Manufacturer = GCA		\|Manufacturer = GCA
	\|Model = 6300		\|Model = 6300

Tkimoto at 00:25, 16 July 2025

2025-07-16T00:25:46Z

← Older revision		Revision as of 00:25, 16 July 2025
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	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1536		\|LabPhone = 626-395-1536
	\|PrimaryStaff = [[~~Guy DeRose~~]]		\|PrimaryStaff = [[Nathan S. Lee]]
	\|StaffEmail = ~~derose~~@caltech.edu		\|StaffEmail = nathslee@caltech.edu
	\|StaffPhone = 626-395-3423		\|StaffPhone = 626-395-3423
	\|Manufacturer = GCA		\|Manufacturer = GCA

Derose at 19:12, 29 June 2024

2024-06-29T19:12:37Z

← Older revision		Revision as of 19:12, 29 June 2024
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	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1536		\|LabPhone = 626-395-1536
	\|PrimaryStaff = [[~~Bert Mendoza~~]]		\|PrimaryStaff = [[Guy DeRose]]
	\|StaffEmail = ~~bertm~~@caltech.edu		\|StaffEmail = derose@caltech.edu
	\|StaffPhone = 626-395-~~4075~~		\|StaffPhone = 626-395-3423
	\|Manufacturer = GCA		\|Manufacturer = GCA
	\|Model = 6300		\|Model = 6300

Sydney: Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T22:58:30Z

Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 22:58, 15 April 2024
Line 57:		Line 57:
	=== Optical Lithography Resources ===		=== Optical Lithography Resources ===
	* [[Optical Lithography Resources \| Optical Lithography Resources Page]]		* [[Optical Lithography Resources \| Optical Lithography Resources Page]]
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Stepper from the dropdown menu)

	== Related Instrumentation in the KNI ==		== Related Instrumentation in the KNI ==

Sydney: Adjusted text to refer to FBS instead of LabRunr

2024-04-15T22:57:24Z

Adjusted text to refer to FBS instead of LabRunr

← Older revision		Revision as of 22:57, 15 April 2024
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	* System is setup for 4 inch wafers and pieces smaller than 100mm.		* System is setup for 4 inch wafers and pieces smaller than 100mm.

	=== ~~Labrunr~~ Reservation Rules:===		=== FBS Reservation Rules:===
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-

Derose: /* Equipment Data */

2022-06-30T05:36:26Z

Equipment Data

← Older revision		Revision as of 05:36, 30 June 2022
Line 57:		Line 57:
	=== Optical Lithography Resources ===		=== Optical Lithography Resources ===
	* [[Optical Lithography Resources \| Optical Lithography Resources Page]]		* [[Optical Lithography Resources \| Optical Lithography Resources Page]]
	=== Equipment ~~Data~~ ===		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Stepper from the dropdown menu)

	== Related Instrumentation in the KNI ==		== Related Instrumentation in the KNI ==

Bertm: /* Labrunr Reservation Rules: */

2022-06-02T17:25:14Z

Labrunr Reservation Rules:

← Older revision		Revision as of 17:25, 2 June 2022
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	\| Weekend \|\| 14 \|\| 6 \|\| 18		\| Weekend \|\| 14 \|\| 6 \|\| 18
	\|}		\|}
	''' ~~Email the tool manager for~~ reservations that ~~do not~~ follow the reservation policy BEFORE scheduling ~~the reservation~~.'''		''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
	'' Your reservation can be cancelled any time by the tool manager if it does not follow the tool reservation policy.''		'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''

	=== SOPs ===		=== SOPs ===

Bertm: /* Labrunr Reservation Rules: */

2022-06-02T15:10:05Z

Labrunr Reservation Rules:

← Older revision		Revision as of 15:10, 2 June 2022
Line 40:		Line 40:
	\| Weekend \|\| 14 \|\| 6 \|\| 18		\| Weekend \|\| 14 \|\| 6 \|\| 18
	\|}		\|}
	'' Email the tool manager for reservations that do not follow the reservation policy ~~before making~~ the tool reservation.''		''' Email the tool manager for reservations that do not follow the reservation policy BEFORE scheduling the reservation.'''
			'' Your reservation can be cancelled any time by the tool manager if it does not follow the tool reservation policy.''

	=== SOPs ===		=== SOPs ===