Tube Furnaces for Wet & Dry Processing - Revision history

Sydney: Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T22:59:33Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 22:59, 15 April 2024
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	* Water Vapor (Tube 1)		* Water Vapor (Tube 1)
	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Furnace1 or Furnace2 from the dropdown menu)

	===== Tystar Oxidation Recipe =====		===== Tystar Oxidation Recipe =====

2023-04-24T23:45:48Z

Allowed Materials: added SiNx

← Older revision		Revision as of 23:45, 24 April 2023
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	* Annealing		* Annealing
	===== Allowed Materials =====		===== Allowed Materials =====
	* Silicon or sapphire that is completely free of metal or organic contamination		* Silicon, SiNx, or sapphire that is completely free of metal or organic contamination
	** Recommended to have undergone a standard RCA clean or similar beforehand		** Recommended to have undergone a standard RCA clean or similar beforehand
	* No other sample material allowed		* No other sample material allowed
	* No metal or organic contamination		* No metal or organic contamination
	** Wafers must not have been contacted by metal tweezers, etc. without appropriate cleaning to remove metal contamination		** Wafers must not have been contacted by metal tweezers, etc. without appropriate cleaning to remove metal contamination

	===== Gas List =====		===== Gas List =====
	* Nitrogen		* Nitrogen

2022-06-30T05:38:59Z

Equipment Data

← Older revision		Revision as of 05:38, 30 June 2022
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	* Water Vapor (Tube 1)		* Water Vapor (Tube 1)
	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Furnace1 or Furnace2 from the dropdown menu)

	===== Tystar Oxidation Recipe =====		===== Tystar Oxidation Recipe =====
	* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]		* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]		* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]

2022-04-15T23:13:10Z

added sapphire samples allowed

← Older revision		Revision as of 23:13, 15 April 2022
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	}}		}}
	== Description ==		== Description ==
	The system is designed for processing up to one-hundred, 150 mm (6") silicon wafers per tube and can accommodate smaller sample sizes also. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.		The system is designed for processing up to one-hundred, 150 mm (6") silicon or sapphire wafers per tube and can accommodate smaller sample sizes also. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.
	===== Applications =====		===== Applications =====
	* Dry & Wet oxidation		* Dry & Wet oxidation
	* Annealing		* Annealing
	===== Allowed Materials =====		===== Allowed Materials =====
	* Silicon that is completely free of metal or organic contamination		* Silicon or sapphire that is completely free of metal or organic contamination
	** Recommended to have undergone a standard RCA clean or similar beforehand		** Recommended to have undergone a standard RCA clean or similar beforehand
	* No other sample material allowed		* No other sample material allowed

2022-04-08T17:32:29Z

← Older revision		Revision as of 17:32, 8 April 2022
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	}}		}}
	== Description ==		== Description ==
	The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.		The system is designed for processing up to one-hundred, 150 mm (6") silicon wafers per tube and can accommodate smaller sample sizes also. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.
	===== Applications =====		===== Applications =====
	* Dry & Wet oxidation		* Dry & Wet oxidation
	* Annealing		* Annealing
			===== Allowed Materials =====
			* Silicon that is completely free of metal or organic contamination
			** Recommended to have undergone a standard RCA clean or similar beforehand
			* No other sample material allowed
			* No metal or organic contamination
			** Wafers must not have been contacted by metal tweezers, etc. without appropriate cleaning to remove metal contamination
			===== Gas List =====
			* Nitrogen
			* Oxygen
			* Water Vapor (Tube 1)
	== Resources ==		== Resources ==
	===== Equipment Data =====		===== Equipment Data =====

2021-09-21T23:31:29Z

update primary staff

← Older revision		Revision as of 23:31, 21 September 2021
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	\|RoomLocation = B235 Steele		\|RoomLocation = B235 Steele
	\|LabPhone = 626-395-1532		\|LabPhone = 626-395-1532
	\|PrimaryStaff = [[~~Nathan S. Lee~~]]		\|PrimaryStaff = [[Kelly McKenzie]]
	\|StaffEmail = ~~nathslee~~@caltech.edu		\|StaffEmail = kmmckenz@caltech.edu
	\|StaffPhone = 626-395-~~1319~~		\|StaffPhone = 626-395-5732
	\|Manufacturer = Tystar Corporation		\|Manufacturer = Tystar Corporation
	\|Model = Tytan Horizontal<br>Diffusion Furnace		\|Model = Tytan Horizontal<br>Diffusion Furnace

2020-08-01T05:21:33Z

Resources

← Older revision		Revision as of 05:21, 1 August 2020
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	* Annealing		* Annealing
	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information]
	===== Tystar Oxidation Recipe =====		===== Tystar Oxidation Recipe =====
	* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]		* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]		* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]

2020-03-11T19:40:52Z

Resources

← Older revision		Revision as of 19:40, 11 March 2020
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	* Annealing		* Annealing
	== Resources ==		== Resources ==
			===== Tystar Oxidation Recipe =====
			* [https://caltech.box.com/s/nqiiqwlhip4dcult2mtuvvdlxw0gv086 Wet Oxidation 1000C ]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]		* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]

2020-02-20T22:00:07Z

← Older revision		Revision as of 22:00, 20 February 2020
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	\|Model = Tytan Horizontal<br>Diffusion Furnace		\|Model = Tytan Horizontal<br>Diffusion Furnace
	\|Techniques = Oxidation, Annealing		\|Techniques = Oxidation, Annealing
	\|EmailList = kni-tystar~~@caltech.edu~~		\|EmailList = kni-tystar
	\|EmailListName = Tystar		\|EmailListName = Tystar
	}}		}}

2019-05-28T16:29:28Z

SOPs & Troubleshooting

← Older revision		Revision as of 16:29, 28 May 2019
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	== Resources ==		== Resources ==
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ~~(Coming Soon)~~]		* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP ]