Spectroscopic Ellipsometer - Revision history

Alexw at 23:48, 30 March 2020

2020-03-30T23:48:12Z

← Older revision		Revision as of 23:48, 30 March 2020
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	** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]		** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]
	** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators]		** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators]
			** [https://youtu.be/EY7wKNnstMw Part 5: Thickness Measurement of Metals]

	== Specifications ==		== Specifications ==

Alexw at 23:36, 30 March 2020

2020-03-30T23:36:42Z

← Older revision		Revision as of 23:36, 30 March 2020
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	** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]		** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]
	** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]		** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]
			** [https://youtu.be/grQ1izdiT4A Part 4: Modeling Absorption with Oscillators]

	== Specifications ==		== Specifications ==

Jpalmer at 21:55, 20 February 2020

2020-02-20T21:55:23Z

← Older revision		Revision as of 21:55, 20 February 2020
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	\|Model = M-2000		\|Model = M-2000
	\|Techniques = Ellipsometry		\|Techniques = Ellipsometry
	\|EmailList = kni-metrology~~@caltech.edu~~		\|EmailList = kni-metrology
	\|EmailListName = Metrology		\|EmailListName = Metrology
	}}		}}

Matthew at 21:51, 27 May 2019

2019-05-27T21:51:10Z

← Older revision		Revision as of 21:51, 27 May 2019
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	\|ImageOne = M-2000-Ellipsometer.jpg		\|ImageOne = M-2000-Ellipsometer.jpg
	\|ImageTwo = M-2000-Ellipsometer.jpg		\|ImageTwo = M-2000-Ellipsometer.jpg
	\|InstrumentType = [[Equipment_List#Optical Characterization\|Optical Characterization]]		\|InstrumentType = [[Equipment_List#Optical Characterization\|Optical Characterization]],<br>[[Equipment_List#Metrology\|Metrology]]
	\|RoomLocation = B235 Steele		\|RoomLocation = B235 Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539

Matthew: /* Video Tutorials */

2019-05-27T21:36:11Z

Video Tutorials

← Older revision		Revision as of 21:36, 27 May 2019
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	===== Video Tutorials =====		===== Video Tutorials =====
	* Ellipsometry & CompleteEASE:		* Ellipsometry & CompleteEASE:
	** [https://youtu.be/M4jGUP-883U ~~Part1~~: Fitting basics for transparent films]		** [https://youtu.be/M4jGUP-883U Part 1: Fitting basics for transparent films]
	** [https://youtu.be/54w-i0R4SMA ~~Part2~~: Transparent polymers]		** [https://youtu.be/54w-i0R4SMA Part 2: Transparent polymers]
	** [https://youtu.be/l6-uTJ-V3EU ~~Part3~~: Absorbing Films via B-Spline]		** [https://youtu.be/l6-uTJ-V3EU Part 3: Absorbing Films via B-Spline]

	== Specifications ==		== Specifications ==

Matthew at 21:35, 27 May 2019

2019-05-27T21:35:51Z

← Older revision		Revision as of 21:35, 27 May 2019
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	\|ImageTwo = M-2000-Ellipsometer.jpg		\|ImageTwo = M-2000-Ellipsometer.jpg
	\|InstrumentType = [[Equipment_List#Optical Characterization\|Optical Characterization]]		\|InstrumentType = [[Equipment_List#Optical Characterization\|Optical Characterization]]
	\|RoomLocation = ~~B123~~ Steele		\|RoomLocation = B235 Steele
	\|LabPhone = 626-395-1539		\|LabPhone = 626-395-1539
	\|PrimaryStaff = [[Alex Wertheim]]		\|PrimaryStaff = [[Alex Wertheim]]
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	}}		}}
	== Description ==		== Description ==
	The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 ~~degrees~~, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.		The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

	===== Applications =====		===== Applications =====
	* Thickness measurement		* Thickness measurement
	* Optical/electronic property analysis		* Optical & electronic property analysis
	* Surface roughness measurement		* Surface roughness measurement
	* Materials identification		* Materials identification
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	===== SOP =====		===== SOP =====
	* [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP]		* [https://caltech.box.com/s/jeu08iii0khpxbhuwvaiow3vvyix8t4m KNI SOP]

	===== Video Tutorials =====		===== Video Tutorials =====
	* Ellipsometry & CompleteEASE:		* Ellipsometry & CompleteEASE:
	** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] \| [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers] \| [https://youtu.be/l6-uTJ-V3EU Part3: Absorbing Films via B-Spline]		** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films]
			** [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers]
			** [https://youtu.be/l6-uTJ-V3EU Part3: Absorbing Films via B-Spline]

	== Specifications ==		== Specifications ==
	===== Hardware Specifications =====		===== Hardware Specifications =====
	* CompleteEASE measurement and analysis software		* CompleteEASE measurement and analysis software
	* Spectral ~~range~~: 370-~~1000nm~~		* Spectral Range: 370-1000 nm
	* Motorized stage enables automated mapping scans across up to ~~100mm~~ wafers		* Motorized stage enables automated mapping scans across up to 100 mm wafers
	* Automatic measurement angle control		* Automatic measurement angle control
	* Automatic sample alignment		* Automatic sample alignment
	* ~~2mm~~ spot size		* 2 mm spot size
	** Removable beam focusing probes reduce spot size to ~~300um~~		** Removable beam focusing probes can reduce spot size to 300 μm

Alexw at 23:48, 23 May 2019

2019-05-23T23:48:52Z

← Older revision		Revision as of 23:48, 23 May 2019
Line 31:		Line 31:
	===== Video Tutorials =====		===== Video Tutorials =====
	* Ellipsometry & CompleteEASE:		* Ellipsometry & CompleteEASE:
	** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] \| [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers]		** [https://youtu.be/M4jGUP-883U Part1: Fitting basics for transparent films] \| [https://youtu.be/54w-i0R4SMA Part2: Transparent polymers] \| [https://youtu.be/l6-uTJ-V3EU Part3: Absorbing Films via B-Spline]

	~~===== Manufacturer Manuals =====~~
	* [https://caltech.box.com/s/og4309108q4k2jwhkaxqtpiujg2al5iu Manual 1]
	* [https://caltech.box.com/s/j0t3w6i53jhfjcva8i4qvlatdh7t1tzw Manual 2]

	== Specifications ==		== Specifications ==

Matthew: /* Description */

2019-05-22T00:48:30Z

Description

← Older revision		Revision as of 00:48, 22 May 2019
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	}}		}}
	== Description ==		== Description ==
	The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' & ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.		The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

	===== Applications =====		===== Applications =====

Matthew at 00:48, 22 May 2019

2019-05-22T00:48:05Z

← Older revision		Revision as of 00:48, 22 May 2019
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	{{InstrumentInfoboxOneImage\|		{{InstrumentInfoboxOneImage\|
	\|InstrumentName = M-2000 Spectroscopic Ellipsometer		\|InstrumentName = M-2000 Spectroscopic Ellipsometer
	\|HeaderColor = #~~F2682A~~		\|HeaderColor = #F5A81C
	\|ImageOne = M-2000-Ellipsometer.jpg		\|ImageOne = M-2000-Ellipsometer.jpg
	\|ImageTwo = M-2000-Ellipsometer.jpg		\|ImageTwo = M-2000-Ellipsometer.jpg
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	\|StaffPhone = 626-395-3371		\|StaffPhone = 626-395-3371
	\|Manufacturer = J.A. Woolam Company		\|Manufacturer = J.A. Woolam Company
			\|Model = M-2000
	\|Techniques = Ellipsometry		\|Techniques = Ellipsometry
	\|EmailList = kni-metrology@caltech.edu		\|EmailList = kni-metrology@caltech.edu

Matthew: /* Description */

2019-05-22T00:47:17Z

Description

← Older revision		Revision as of 00:47, 22 May 2019
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	}}		}}
	== Description ==		== Description ==
	The J.A. Woolam M-2000 spectroscopic ellipsometer is a ~~powerful~~ tool for optical thin film analysis ~~which~~ enables determination of thickness, optical constants n&k (refractive index and absorption coefficient), and ~~even~~ allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees allowing both standard ellipsometry and transmission measurements. ~~Equipped~~ with a motorized sample stage ~~which~~ enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.		The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' & ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

	===== Applications =====		===== Applications =====
Line 22:		Line 22:
	* Optical/electronic property analysis		* Optical/electronic property analysis
	* Surface roughness measurement		* Surface roughness measurement
	* Materials identification		* Materials identification

	== Resources ==		== Resources ==