Labline: Electron Beam Evaporator - Revision history

Alexw: /* Electron Beam Evaporation Systems */

2026-03-19T19:27:15Z

Electron Beam Evaporation Systems

← Older revision		Revision as of 19:27, 19 March 2026
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	===== Electron Beam Evaporation Systems =====		===== Electron Beam Evaporation Systems =====
	* [[~~CHA:~~ Electron Beam Evaporator\|~~CHA:~~ Electron Beam Evaporator]]		* [[AJA Orion ATC Series Electron Beam Evaporator\|AJA Orion ATC Series Electron Beam Evaporator]]

	===== Chemical Vapor Deposition =====		===== Chemical Vapor Deposition =====
	* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]		* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]
	* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]		* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]

2026-03-19T19:25:55Z

Applications

← Older revision		Revision as of 19:25, 19 March 2026
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	===== Applications =====		===== Applications =====
	* Metal deposition (Ti, Pt, Au, Al)		* Metal deposition (Ti, Pt, Au, Al)
			** Other materials may be available upon request with restrictions: metals such as Cr, Fe, Ni, Co are not available. If you wish to deposit these see the links to related systems on this page.
	* Lift-off		* Lift-off
	* Non-selective etch		* Non-selective etch

2024-04-15T23:24:37Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:24, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Ebeam_Lesker from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]		* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]

2022-06-30T05:25:53Z

Equipment Data

← Older revision		Revision as of 05:25, 30 June 2022
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	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Ebeam_Lesker from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]		* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]

2021-01-04T22:24:50Z

← Older revision		Revision as of 22:24, 4 January 2021
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	* Evaporation Source: 1x single emitter, 4-pocket e-beam evaporation source		* Evaporation Source: 1x single emitter, 4-pocket e-beam evaporation source
	* 1x Argon ion source (Filament type)		* 1x Argon ion source (Filament type)
			* Accepts up to 1x 150mm wafer or smaller wafers/pieces

	== Related Instrumentation in the KNI ==		== Related Instrumentation in the KNI ==

2020-10-13T17:39:32Z

Video Tutorials

← Older revision		Revision as of 17:39, 13 October 2020
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	===== Video Tutorials =====		===== Video Tutorials =====
	* [https://youtu.be/jq5M7fkgpfM Labline Training]		* [https://youtu.be/jq5M7fkgpfM Labline Training]
			* [https://youtu.be/5C6It9YO_jg Sample Load & Transfer]

	== Specifications ==		== Specifications ==

2020-08-01T05:16:15Z

Resources

← Older revision		Revision as of 05:16, 1 August 2020
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	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]		* [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]

2020-06-25T22:51:03Z

@@ Line 29: / Line 29: @@
 * [https://caltech.box.com/s/9sx2vhd9gz5rdhviexii8hj6lftvxguy KNI SOP]
 * [https://caltech.box.com/s/sqfi1s85wykxzecvt0mqdv5fr27nggvc Troubleshooting Guide]
 ===== Video Tutorials =====

2020-02-20T21:38:26Z

← Older revision		Revision as of 21:38, 20 February 2020
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	\|Model = Labline		\|Model = Labline
	\|Techniques = E-beam Evaporation,<br>Ion-Assisted Deposition (IAD),</br>Ion Milling		\|Techniques = E-beam Evaporation,<br>Ion-Assisted Deposition (IAD),</br>Ion Milling
	\|EmailList = kni-labline~~@caltech.edu~~		\|EmailList = kni-labline
	\|EmailListName = Labline		\|EmailListName = Labline
	}}		}}

2019-09-20T21:16:36Z

← Older revision		Revision as of 21:16, 20 September 2019
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	* Evaporation Source: 1x single emitter, 4-pocket e-beam evaporation source		* Evaporation Source: 1x single emitter, 4-pocket e-beam evaporation source
	* 1x Argon ion source (Filament type)		* 1x Argon ion source (Filament type)

			== Related Instrumentation in the KNI ==
			===== Sputtering Systems =====
			* [[ATC Orion 8: Chalcogenide Sputter System\|ATC Orion 8: Chalcogenide Sputter System]]
			* [[ATC Orion 8: Dielectric Sputter System\|ATC Orion 8: Dielectric Sputter System]]

			===== Electron Beam Evaporation Systems =====
			* [[CHA: Electron Beam Evaporator\|CHA: Electron Beam Evaporator]]

			===== Chemical Vapor Deposition =====
			* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]
			* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]