Guide to Choosing KNI SEMs & FIBs - Revision history

Ykim3 at 16:12, 23 January 2026

2026-01-23T16:12:23Z

← Older revision		Revision as of 16:12, 23 January 2026
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta], [Sirion: SEM & EDS \| Sirion]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples

Ykim3 at 16:11, 23 January 2026

2026-01-23T16:11:58Z

← Older revision		Revision as of 16:11, 23 January 2026
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs([[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta], [Sirion: SEM & EDS \| Sirion]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples

Ykim3 at 16:11, 23 January 2026

2026-01-23T16:11:32Z

← Older revision		Revision as of 16:11, 23 January 2026
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs([[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples

Ykim3 at 16:10, 23 January 2026

2026-01-23T16:10:58Z

← Older revision		Revision as of 16:10, 23 January 2026
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs (~~[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]],~~ [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples

Tkimoto: /* High Magnification Imaging */

2025-10-21T23:33:58Z

High Magnification Imaging

← Older revision		Revision as of 23:33, 21 October 2025
Line 11:		Line 11:
	==High Magnification Imaging==		==High Magnification Imaging==
	If you need to take high mag images with less than 4 μm FOV (i.e. if you're using “Immersion Mode” aka “Ultra High Resolution (UHR) Mode”):		If you need to take high mag images with less than 4 μm FOV (i.e. if you're using “Immersion Mode” aka “Ultra High Resolution (UHR) Mode”):
	#'''[[Sirion: SEM & EDS \| Sirion]]:''' High resolution but limited depth of field e.g. when tilting; ~~Nova 200 has 3-4 min pump/vent times and~~ Sirion has 1-2 min pump/vent times		#'''[[Sirion: SEM & EDS \| Sirion]]:''' High resolution but limited depth of field e.g. when tilting; Sirion has 1-2 min pump/vent times
	#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Maintains great depth of field at high resolution with He imaging; 2 min sample transfer times via load lock		#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Maintains great depth of field at high resolution with He imaging; 2 min sample transfer times via load lock
	#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Use for high-resolution imaging if also incorporating FIB (e.g. if imaging cross-sections), same pump/vent times as Nova 200 (3-4 mins)		#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Use for high-resolution imaging if also incorporating FIB (e.g. if imaging cross-sections), same pump/vent times as Nova 200 (3-4 mins)

Tkimoto: /* High Magnification Imaging */

2025-10-21T23:33:41Z

High Magnification Imaging

← Older revision		Revision as of 23:33, 21 October 2025
Line 11:		Line 11:
	==High Magnification Imaging==		==High Magnification Imaging==
	If you need to take high mag images with less than 4 μm FOV (i.e. if you're using “Immersion Mode” aka “Ultra High Resolution (UHR) Mode”):		If you need to take high mag images with less than 4 μm FOV (i.e. if you're using “Immersion Mode” aka “Ultra High Resolution (UHR) Mode”):
	#~~'''[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]]''' or~~ '''[[Sirion: SEM & EDS \| Sirion]]:''' High resolution but limited depth of field e.g. when tilting; Nova 200 has 3-4 min pump/vent times and Sirion has 1-2 min pump/vent times		#'''[[Sirion: SEM & EDS \| Sirion]]:''' High resolution but limited depth of field e.g. when tilting; Nova 200 has 3-4 min pump/vent times and Sirion has 1-2 min pump/vent times
	#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Maintains great depth of field at high resolution with He imaging; 2 min sample transfer times via load lock		#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Maintains great depth of field at high resolution with He imaging; 2 min sample transfer times via load lock
	#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Use for high-resolution imaging if also incorporating FIB (e.g. if imaging cross-sections), same pump/vent times as Nova 200 (3-4 mins)		#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Use for high-resolution imaging if also incorporating FIB (e.g. if imaging cross-sections), same pump/vent times as Nova 200 (3-4 mins)

Tkimoto: /* Low Magnification Imaging */

2025-10-21T23:33:28Z

Low Magnification Imaging

← Older revision		Revision as of 23:33, 21 October 2025
Line 6:		Line 6:
	If you only need to take low mag images, e.g. with a 4 μm field of view (FOV) or larger (i.e. if you're only using “Field Free Mode” aka “Normal Mode"):		If you only need to take low mag images, e.g. with a 4 μm field of view (FOV) or larger (i.e. if you're only using “Field Free Mode” aka “Normal Mode"):
	#'''[[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]]:''' Optimal objective lens placement yields best field-free imaging; quick chamber pump/vent times (1-2 mins); backscattered electron detector )BSED) for best Z-contrast imaging		#'''[[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]]:''' Optimal objective lens placement yields best field-free imaging; quick chamber pump/vent times (1-2 mins); backscattered electron detector )BSED) for best Z-contrast imaging
	#'''[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]]''' or '''[[Sirion: SEM & EDS \| Sirion]]:''' Both have an immersion lens, which means the field-free objective lens is not optimally placed for low mag imaging, though still works fine; these SEMs provide the benefit of being able to switch to immersion mode for higher resolution if/when needed		#<!---'''[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]]''' or --->'''[[Sirion: SEM & EDS \| Sirion]]:''' Both have an immersion lens, which means the field-free objective lens is not optimally placed for low mag imaging, though still works fine; these SEMs provide the benefit of being able to switch to immersion mode for higher resolution if/when needed
	#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]''' or '''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' You're generally advised to leave FIBs for FIB-related work and/or the highest-resolution imaging; more expensive than SEMs		#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]''' or '''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' You're generally advised to leave FIBs for FIB-related work and/or the highest-resolution imaging; more expensive than SEMs

Tkimoto at 23:33, 21 October 2025

2025-10-21T23:33:08Z

← Older revision		Revision as of 23:33, 21 October 2025
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]], [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:~~derose~~@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]], [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:ykim@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples
Line 17:		Line 17:
	==Highest Magnification Imaging==		==Highest Magnification Imaging==
	If you need to take images with less than 2 μm FOV:		If you need to take images with less than 2 μm FOV:
	#'''[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]]:''' Can image as small as ~800 nm FOV – and features as small as 6 nm – with good clarity; has limited depth of field when in the Immersion Mode; is the cheapest option		<!---#'''[[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]]:''' Can image as small as ~800 nm FOV – and features as small as 6 nm – with good clarity; has limited depth of field when in the Immersion Mode; is the cheapest option --->
	#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Can image as small as ~300 nm FOV – and features as small as 3 – with good clarity; maintains depth of field at smallest FOVs; more expensive than Nova 200		#'''[[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Can image as small as ~300 nm FOV – and features as small as 3 – with good clarity; maintains depth of field at smallest FOVs; more expensive than Nova 200
	#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Works as well as the Nova 200 at these FOVs, but is more expensive to use because it has Ga-FIB capability		#'''[[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]]:''' Works as well as the Nova 200 at these FOVs, but is more expensive to use because it has Ga-FIB capability

Matthew at 09:44, 8 June 2020

2020-06-08T09:44:01Z

← Older revision		Revision as of 09:44, 8 June 2020
Line 1:		Line 1:
	*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]], [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:~~matthew.hunt~~@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.		*This guide will help you choose the best scanning electron microscopes (SEMs) and focused ion beam systems (FIBs) for your work. SEMs ([[Nova 200 NanoLab: SEM, EDS & WDS \| Nova 200]], [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta]], [[Sirion: SEM & EDS \| Sirion]]) are ~33% cheaper per hour than FIBs ([[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]], [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]); see [[Usage Rates \| usage rate details]]. Once you know how to use one microscope, it is easy to learn the others, so please [mailto:derose@caltech.edu request training]. We want you to be efficient with your cleanroom expenses and we want to be efficient, as a group, in terms of allocating microscopy resources to the right kinds of work.
	*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)		*See the “Functionality of SEMs & FIBs” table below for application specifics associated with each microscope (e.g. EDS, Probe Station, Omniprobe, etc.)
	*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples		*See the [https://caltech.box.com/s/cs0wj4dn89am3fof8ox0vqetaad8ylg8 KNI's Microscopy Lectures] for more details on physical principles, applications, and examples

Matthew at 18:36, 21 October 2019

2019-10-21T18:36:27Z

← Older revision		Revision as of 18:36, 21 October 2019
Line 33:		Line 33:
	#'''Ga-, Ne-, and He-FIB Hard Mask Lithography on [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Directly pattern a hard mask (e.g. [[FlexAL II: Atomic Layer Deposition (ALD) \| ALD]] Al<sub>2</sub>O<sub>3</sub>) that subsequently gets used as an etch mask		#'''Ga-, Ne-, and He-FIB Hard Mask Lithography on [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab]]:''' Directly pattern a hard mask (e.g. [[FlexAL II: Atomic Layer Deposition (ALD) \| ALD]] Al<sub>2</sub>O<sub>3</sub>) that subsequently gets used as an etch mask

	=='Functionality of KNI SEMs & FIBs' Table==		=="Functionality of KNI SEMs & FIBs" Table==
	[[File:KNI-SEM-and-FIB-Functionality-Table.png\|thumb\|left\|1000px\|Consult this table to determine which of the KNI's SEMs and FIBs offer a particular functionality that you need]]		[[File:KNI-SEM-and-FIB-Functionality-Table.png\|thumb\|left\|1000px\|Consult this table to determine which of the KNI's SEMs and FIBs offer a particular functionality that you need]]