DWL-66: Direct-Write Laser System - Revision history

Sydney: Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS

2024-04-15T22:55:21Z

Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS

← Older revision		Revision as of 22:55, 15 April 2024
Line 23:		Line 23:

	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Maskwriter from the dropdown menu)

	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]		* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]
	====== ~~Labrunr~~ Reservation Rules:======		====== FBS Reservation Rules:======
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-

Derose: /* Equipment Data */

2022-06-30T05:37:35Z

Equipment Data

← Older revision		Revision as of 05:37, 30 June 2022
Line 23:		Line 23:

	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Maskwriter from the dropdown menu)

	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]		* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]

Bertm: /* Labrunr Reservation Rules: */

2022-06-02T17:24:11Z

Labrunr Reservation Rules:

← Older revision		Revision as of 17:24, 2 June 2022
Line 38:		Line 38:
	\| Weekend \|\| 14 \|\| 6 \|\| 18		\| Weekend \|\| 14 \|\| 6 \|\| 18
	\|}		\|}
	''' ~~Email the tool manager for~~ reservations that ~~do not~~ follow the reservation policy BEFORE scheduling ~~the reservation~~.'''		''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
	'' Your reservation can be cancelled any time by the tool manager if it does not follow the tool reservation policy.''		'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''

	===== Optical Lithography Resources =====		===== Optical Lithography Resources =====

Bertm: /* SOPs */

2022-06-02T15:48:46Z

SOPs

@@ Line 27: / Line 27: @@
 ===== SOPs =====
 * [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]
 ===== Optical Lithography Resources =====

Derose at 16:35, 12 October 2020

2020-10-12T16:35:57Z

← Older revision		Revision as of 16:35, 12 October 2020
Line 37:		Line 37:
	== Specifications ==		== Specifications ==
	* Exposure: 442 nm wavelength HeCd laser		* Exposure: 442 nm wavelength HeCd laser

			== Related Instrumentation in the KNI ==
			===== Electron Beam Lithography =====
			* [[EBPG 5200: 100 kV Electron Beam Lithography\|EBPG 5200: 100 kV Electron Beam Lithography]]
			* [[EBPG 5000+: 100 kV Electron Beam Lithography \| EBPG 5000+: 100 kV Electron Beam Lithography]]
			* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station \| Quanta 200F: SEM with 1-30 kV Electron Beam Lithography]]
			* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography \| Tecnai TF-20: TEM & STEM with 80-200 kV Electron Beam Lithography]]
			===== Ion Beam Lithography =====
			* [[ORION NanoFab: Helium, Neon & Gallium FIB \| ORION NanoFab: Helium (5-40 kV), Neon (5-35 kV) & Gallium (1-30 kV) Focused Ion Beam Lithography & Microscopy]]
			===== Optical Lithography =====
			* [[Contact Mask Aligners: MA6 & MA6/BA6 \| Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6]]
			* [[Wafer Stepper \| i-Line Wafer Stepper: GCA model 6300]]
			* [[CNI-PV 2.1: Nano Imprint Lithography \| Nano Imprint Lithography: NILT CNI-PV 2.1]]
			* [[Nanoscribe PPGT: Microscale 3D Printer \| Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]]
			* [[Optical Lithography Resources]]

Bertm at 18:39, 27 August 2020

2020-08-27T18:39:09Z

← Older revision		Revision as of 18:39, 27 August 2020
Line 7:		Line 7:
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1536		\|LabPhone = 626-395-1536
	\|PrimaryStaff = [[~~Bert Mendoza~~]]		\|PrimaryStaff = [[Alex Wertheim]]
	\|StaffEmail = ~~bertm~~@caltech.edu		\|StaffEmail = alexw@caltech.edu
	\|StaffPhone = 626-395-~~4075~~		\|StaffPhone = 626-395-3371
	\|Manufacturer = Heidelberg Instruments		\|Manufacturer = Heidelberg Instruments
	\|Model = DWL-66		\|Model = DWL-66

Derose: /* Resources */

2020-08-01T04:03:21Z

Resources

← Older revision		Revision as of 04:03, 1 August 2020
Line 23:		Line 23:

	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]
	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]		* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]

Matthew: /* Resources */

2019-11-08T01:25:59Z

Resources

← Older revision		Revision as of 01:25, 8 November 2019
Line 25:		Line 25:
	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]		* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]

			===== Optical Lithography Resources =====
			* [[Optical Lithography Resources \| Optical Lithography Resources Page]]

	===== Manufacturer Manuals =====		===== Manufacturer Manuals =====

Derose: /* SOPs */

2019-05-28T21:46:12Z

SOPs

← Older revision		Revision as of 21:46, 28 May 2019
Line 24:		Line 24:
	== Resources ==		== Resources ==
	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/~~miia23ob94wsdomfb2bi00d4cfhdeuao~~ Operation SOP]		* [https://caltech.box.com/s/y86tagq2ajxt16wnj5bmqwupas1f1bs7 Operation SOP]

	===== Manufacturer Manuals =====		===== Manufacturer Manuals =====

Bertm: /* SOPs */

2019-05-28T21:00:41Z

SOPs

← Older revision		Revision as of 21:00, 28 May 2019
Line 24:		Line 24:
	== Resources ==		== Resources ==
	===== SOPs =====		===== SOPs =====
	* [https://caltech.box.com/s/miia23ob94wsdomfb2bi00d4cfhdeuao ~~General~~ SOP]		* [https://caltech.box.com/s/miia23ob94wsdomfb2bi00d4cfhdeuao Operation SOP]

	===== Manufacturer Manuals =====		===== Manufacturer Manuals =====
	* [https://caltech.box.com/s/kvh2lwhzq6gzd12a43a5nr1xv0hrwb8p User Guide, Part 1]		* [https://caltech.box.com/s/kvh2lwhzq6gzd12a43a5nr1xv0hrwb8p User Guide, Part 1]