Contact Mask Aligners: MA6 & MA6/BA6 - Revision history

Tkimoto at 00:30, 16 July 2025

2025-07-16T00:30:24Z

← Older revision		Revision as of 00:30, 16 July 2025
Line 7:		Line 7:
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1535		\|LabPhone = 626-395-1535
	\|PrimaryStaff = ~~Alireza Ghaffari~~		\|PrimaryStaff = Nathan S. Lee
	\|StaffEmail = ~~alireza~~@caltech.edu		\|StaffEmail = nathslee@caltech.edu
	\|StaffPhone = 626-395-~~3984~~		\|StaffPhone = 626-395-4386
	\|Manufacturer = Suss MicroTec		\|Manufacturer = Suss MicroTec
	\|Model = MA6 & MA6/BA6		\|Model = MA6 & MA6/BA6

Derose at 19:11, 29 June 2024

2024-06-29T19:11:40Z

← Older revision		Revision as of 19:11, 29 June 2024
Line 7:		Line 7:
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1535		\|LabPhone = 626-395-1535
	\|PrimaryStaff = ~~Bert Mendoza~~		\|PrimaryStaff = Alireza Ghaffari
	\|StaffEmail = ~~bertm~~@caltech.edu		\|StaffEmail = alireza@caltech.edu
	\|StaffPhone = 626-395-~~4075~~		\|StaffPhone = 626-395-3984
	\|Manufacturer = Suss MicroTec		\|Manufacturer = Suss MicroTec
	\|Model = MA6 & MA6/BA6		\|Model = MA6 & MA6/BA6

Sydney: Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T22:59:02Z

Adjusted text to refer to FBS instead of LabRunr, and removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 22:59, 15 April 2024
Line 57:		Line 57:
	* [https://caltech.box.com/s/e1b5co1cb4hwbu21ala3cnqt888tma7f Alignment Mark Suggestion Document]		* [https://caltech.box.com/s/e1b5co1cb4hwbu21ala3cnqt888tma7f Alignment Mark Suggestion Document]

	==== ~~Labrunr~~ Reservation Rules:====		==== FBS Reservation Rules:====
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-
Line 70:		Line 70:
	''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''		''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
	'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''		'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''

	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Suss1 or Suss2 from the dropdown menu)

	=== Optical Lithography Resources ===		=== Optical Lithography Resources ===

Derose at 06:41, 17 February 2024

2024-02-17T06:41:07Z

← Older revision		Revision as of 06:41, 17 February 2024
Line 7:		Line 7:
	\|RoomLocation = B217 Steele		\|RoomLocation = B217 Steele
	\|LabPhone = 626-395-1535		\|LabPhone = 626-395-1535
	\|PrimaryStaff = ~~Alireza Ghaffari~~		\|PrimaryStaff = Bert Mendoza
	\|StaffEmail = ~~alireza~~@caltech.edu		\|StaffEmail = bertm@caltech.edu
	\|StaffPhone = 626-395-~~3984~~		\|StaffPhone = 626-395-4075
	\|Manufacturer = Suss MicroTec		\|Manufacturer = Suss MicroTec
	\|Model = MA6 & MA6/BA6		\|Model = MA6 & MA6/BA6

Alireza at 16:28, 27 June 2023

2023-06-27T16:28:23Z

← Older revision		Revision as of 16:28, 27 June 2023
Line 8:		Line 8:
	\|LabPhone = 626-395-1535		\|LabPhone = 626-395-1535
	\|PrimaryStaff = Alireza Ghaffari		\|PrimaryStaff = Alireza Ghaffari
	\|StaffEmail = ~~Alireza~~@caltech.edu		\|StaffEmail = alireza@caltech.edu
	\|StaffPhone = 626-395-3984		\|StaffPhone = 626-395-3984
	\|Manufacturer = Suss MicroTec		\|Manufacturer = Suss MicroTec

Alireza at 16:28, 27 June 2023

2023-06-27T16:28:00Z

← Older revision		Revision as of 16:28, 27 June 2023
Line 8:		Line 8:
	\|LabPhone = 626-395-1535		\|LabPhone = 626-395-1535
	\|PrimaryStaff = Alireza Ghaffari		\|PrimaryStaff = Alireza Ghaffari
	\|StaffEmail = ~~ghaffari~~@caltech.edu		\|StaffEmail = Alireza@caltech.edu
	\|StaffPhone = 626-395-3984		\|StaffPhone = 626-395-3984
	\|Manufacturer = Suss MicroTec		\|Manufacturer = Suss MicroTec

Derose: /* Equipment Data */

2022-06-30T05:35:48Z

Equipment Data

← Older revision		Revision as of 05:35, 30 June 2022
Line 71:		Line 71:
	'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''		'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''

	==== Equipment ~~Data~~ ====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Suss1 or Suss2 from the dropdown menu)


	=== Optical Lithography Resources ===		=== Optical Lithography Resources ===

Bertm: /* Labrunr Reservation Rules: */

2022-06-02T17:24:37Z

Labrunr Reservation Rules:

← Older revision		Revision as of 17:24, 2 June 2022
Line 68:		Line 68:
	\| Weekend \|\| 14 \|\| 6 \|\| 18		\| Weekend \|\| 14 \|\| 6 \|\| 18
	\|}		\|}
	''' ~~Email the tool manager for~~ reservations that ~~do not~~ follow the reservation policy BEFORE scheduling ~~the reservation~~.'''		''' For reservations that DO NOT follow the reservation policy, email the tool manager BEFORE scheduling.'''
	'' Your reservation can be cancelled any time by the tool manager if it does not follow the tool reservation policy.''		'' Your reservation can be cancelled at any time by the tool manager if it does not follow the tool reservation policy.''

	==== Equipment Data ====		==== Equipment Data ====
	* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]		* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]

Bertm at 15:33, 2 June 2022

2022-06-02T15:33:49Z

Show changes

Bertm: /* SOPs & Troubleshooting */

2022-05-27T01:16:08Z

SOPs & Troubleshooting

← Older revision		Revision as of 01:16, 27 May 2022
Line 32:		Line 32:
	* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]		* [https://caltech.box.com/s/j19tuhv68bk0nsa5nruc95g4dizzxtr7 Lithography Pass-down equipment information]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	*Tool Reservation Rules		*Tool Reservation Rules (also for GCA Stepper and DWL-66)
	{\| class="wikitable"		{\| class="wikitable"
	\|-		\|-