ATC Orion 8: Chalcogenide Sputter System - Revision history

Alexw: /* Electron Beam Evaporation Systems */

2026-03-19T19:30:05Z

Electron Beam Evaporation Systems

← Older revision		Revision as of 19:30, 19 March 2026
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	===== Electron Beam Evaporation Systems =====		===== Electron Beam Evaporation Systems =====
	* [[Labline: Electron Beam Evaporator\|Labline: Electron Beam Evaporator]]		* [[Labline: Electron Beam Evaporator\|Labline: Electron Beam Evaporator]]
	* [[~~CHA:~~ Electron Beam Evaporator\|~~CHA:~~ Electron Beam Evaporator]]		* [[AJA Orion ATC Series Electron Beam Evaporator\|AJA Orion ATC Series Electron Beam Evaporator]]

	===== Chemical Vapor Deposition =====		===== Chemical Vapor Deposition =====
	* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]		* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]
	* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]		* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]

2026-03-19T19:29:31Z

Applications

← Older revision		Revision as of 19:29, 19 March 2026
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	** For reactive synthesis of dielectric materials, the [[ATC Orion 8: Dielectric Sputter System \| Orion 8 dielectric sputter system]] is better suited		** For reactive synthesis of dielectric materials, the [[ATC Orion 8: Dielectric Sputter System \| Orion 8 dielectric sputter system]] is better suited
	** For sputtering materials such as Te, Bi, Se, and Sb		** For sputtering materials such as Te, Bi, Se, and Sb
	*** Cr, Mn, Ni, and Fe are excluded from this chamber		*** Cr, Mn, Ni, Co and Fe are excluded from this chamber
	* Surface cleaning & in-situ plasma etch		* Surface cleaning & in-situ plasma etch

2024-04-15T23:06:14Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:06, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Chalc_Sputter from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]		* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]

2022-06-30T05:28:00Z

Equipment Data

← Older revision		Revision as of 05:28, 30 June 2022
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	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Chalc_Sputter from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]		* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]

2020-12-09T03:08:07Z

Video Tutorials

← Older revision		Revision as of 03:08, 9 December 2020
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	* [https://youtu.be/MlxUnwviBiI Dielectric Sputter Training]		* [https://youtu.be/MlxUnwviBiI Dielectric Sputter Training]
	** The chalcogenide and dielectric systems are extremely similar; Please see the SOP for some differences		** The chalcogenide and dielectric systems are extremely similar; Please see the SOP for some differences
			* [https://youtu.be/FlSFfF8C6WQ Advanced Layer Creation - Part 1]
			* [https://youtu.be/Ymb-mZGOjgw Advanced Layer Creation - Part 2]

	== Specifications ==		== Specifications ==

2020-08-01T05:18:05Z

Resources

← Older revision		Revision as of 05:18, 1 August 2020
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	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]		* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]

2020-06-25T22:53:06Z

@@ Line 39: / Line 39: @@
 * [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]
 * [https://caltech.box.com/s/sca3m472qwie0uehx6uv1strte3w2nxx QCM Deposition Rate Measurement Instructions]
 ===== Process Recipes =====

2020-03-17T00:49:38Z

← Older revision		Revision as of 00:49, 17 March 2020
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	* [https://caltech.box.com/s/z3u5bywcp0vlg4usb73i46v0ggnfuooi Troubleshooting Guide]		* [https://caltech.box.com/s/z3u5bywcp0vlg4usb73i46v0ggnfuooi Troubleshooting Guide]
	* [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]		* [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]
			* [https://caltech.box.com/s/sca3m472qwie0uehx6uv1strte3w2nxx QCM Deposition Rate Measurement Instructions]

	===== Process Recipes =====		===== Process Recipes =====

2020-02-20T21:43:08Z

← Older revision		Revision as of 21:43, 20 February 2020
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	\|Model = ATC Orion 8		\|Model = ATC Orion 8
	\|Techniques = Magnetron Sputtering (RF,DC),<br>In-situ Plasma Etch &<br>Surface Cleaning,</br>Reactive Sputtering,<br> Co-Sputtering		\|Techniques = Magnetron Sputtering (RF,DC),<br>In-situ Plasma Etch &<br>Surface Cleaning,</br>Reactive Sputtering,<br> Co-Sputtering
	\|EmailList = kni-sputter~~@caltech.edu~~		\|EmailList = kni-sputter
	\|EmailListName = Sputter		\|EmailListName = Sputter
	}}		}}

2019-12-10T18:48:30Z

SOPs & Troubleshooting

← Older revision		Revision as of 18:48, 10 December 2019
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	* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]		* [https://caltech.box.com/s/nqpy11vmb3g2feo6km3qcpje52u181wc KNI SOP]
	* [https://caltech.box.com/s/z3u5bywcp0vlg4usb73i46v0ggnfuooi Troubleshooting Guide]		* [https://caltech.box.com/s/z3u5bywcp0vlg4usb73i46v0ggnfuooi Troubleshooting Guide]
			* [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]

	===== Process Recipes =====		===== Process Recipes =====