AJA Orion ATC Series Electron Beam Evaporator - Revision history

Alexw: /* Applications */

2026-03-19T19:28:19Z

Applications

← Older revision		Revision as of 19:28, 19 March 2026
Line 20:		Line 20:

	===== Applications =====		===== Applications =====
	* Metal deposition		* Metal deposition. Allows ferromagnetics and diamagnetics
	* Semiconductor deposition (in-situ doping not possible)		* Semiconductor deposition (in-situ doping not possible)
	* Oxide deposition		* Oxide deposition

Alexw at 00:47, 26 April 2024

2024-04-26T00:47:32Z

← Older revision		Revision as of 00:47, 26 April 2024
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	\|InstrumentName = AJA Orion ATC Series Electron Beam Evaporator		\|InstrumentName = AJA Orion ATC Series Electron Beam Evaporator
	\|HeaderColor = #F2682A		\|HeaderColor = #F2682A
	\|ImageOne =		\|ImageOne = PXL 20230728 000709710 (1).jpg
	\|ImageTwo =		\|ImageTwo =
	\|InstrumentType = [[Equipment_List#Deposition\|Deposition]]		\|InstrumentType = [[Equipment_List#Deposition\|Deposition]]

Alexw: /* Resources */

2024-04-26T00:42:22Z

Resources

← Older revision		Revision as of 00:42, 26 April 2024
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	\| Weekend \|\| 7 \|\| 12 \|\| 18		\| Weekend \|\| 7 \|\| 12 \|\| 18
	\|}		\|}

	~~===== Video Tutorials =====~~
	* [linkgoeshere General System Operation]
	* [linkgoeshere In-Situ Crucible Exchange]

	== Specifications ==		== Specifications ==

Alexw: /* SOPs & Troubleshooting */

2024-04-26T00:41:59Z

SOPs & Troubleshooting

← Older revision		Revision as of 00:41, 26 April 2024
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	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/zygxa14nklirrtd6aw0fjdvqlggdyjh6 Standard Operating Procedures (SOP)]		* [https://caltech.box.com/s/zygxa14nklirrtd6aw0fjdvqlggdyjh6 Standard Operating Procedures (SOP)]
	* [linkgoeshere Troubleshooting Guide]

	=== Tool Reservation Rules ===		=== Tool Reservation Rules ===

Sydney: Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T23:03:16Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:03, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select AJA Orion E-Beam Evaporator from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/zygxa14nklirrtd6aw0fjdvqlggdyjh6 Standard Operating Procedures (SOP)]		* [https://caltech.box.com/s/zygxa14nklirrtd6aw0fjdvqlggdyjh6 Standard Operating Procedures (SOP)]

Alexw at 01:14, 22 November 2023

2023-11-22T01:14:22Z

← Older revision		Revision as of 01:14, 22 November 2023
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	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [~~linkgoeshere~~ Standard Operating Procedures (SOP)]		* [https://caltech.box.com/s/zygxa14nklirrtd6aw0fjdvqlggdyjh6 Standard Operating Procedures (SOP)]
	* [linkgoeshere Troubleshooting Guide]		* [linkgoeshere Troubleshooting Guide]

Alexw at 23:29, 26 July 2023

2023-07-26T23:29:34Z

← Older revision		Revision as of 23:29, 26 July 2023
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	===== Electron Beam Evaporation Systems =====		===== Electron Beam Evaporation Systems =====
	* [[~~CHA~~: Electron Beam Evaporator\|~~CHA~~: Electron Beam Evaporator]]		* [[Labline: Electron Beam Evaporator\|Labline: Electron Beam Evaporator]]

	===== Chemical Vapor Deposition =====		===== Chemical Vapor Deposition =====
	* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]		* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]
	* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]		* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]

Alexw: /* Description */

2023-07-26T23:28:29Z

Description

← Older revision		Revision as of 23:28, 26 July 2023
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	}}		}}
	== Description ==		== Description ==
	The AJA International ATC Orion Series system allows for ~~programmable~~ evaporation processes and a ~~convenient ease of maintaining~~.		The AJA International ATC Orion Series system allows for electron beam evaporation of various metals, oxides, and semiconductors. This tool is a true UHV design equipped with dedicated heating jackets and internal heat lamps for an efficient bake-out process. A multi-crystal QCM protects against failed processes due to real-time thickness measurement errors and allows for long periods of maintained UHV conditions by removing the need to vent the chamber for regular sensor upkeep. In addition, crucibles may be swapped without breaking chamber vacuum via the use of a dedicated manual crucible exchanging system.

	===== Applications =====		===== Applications =====
	* Metal deposition		* Metal deposition
			* Semiconductor deposition (in-situ doping not possible)
	* Oxide deposition		* Oxide deposition
	* Lift-off		* Lift-off

Alexw at 23:04, 26 July 2023

2023-07-26T23:04:41Z

← Older revision		Revision as of 23:04, 26 July 2023
Line 17:		Line 17:
	}}		}}
	== Description ==		== Description ==
			The AJA International ATC Orion Series system allows for programmable evaporation processes and a convenient ease of maintaining.

	===== Applications =====		===== Applications =====
Line 29:		Line 29:

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [linkgoeshere ~~KNI~~ SOP]		* [linkgoeshere Standard Operating Procedures (SOP)]
	* [linkgoeshere Troubleshooting Guide]		* [linkgoeshere Troubleshooting Guide]

Alexw: Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = AJA Orion ATC Series Electron Beam Evaporator |HeaderColor = #F2682A |ImageOne = |ImageTwo = |InstrumentType = Deposition |RoomLocation = B235C Steele |LabPhone = 626-395-1539 |PrimaryStaff = Alex Wertheim |StaffEmail = alexw@caltech.edu |StaffPhone = 626-395-3371 |Manufacturer = AJA International |Model = ATC Orion |Techniques = E-beam Evaporation |EmailList = |EmailListName = }} == De..."

2023-07-26T22:44:19Z

Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = AJA Orion ATC Series Electron Beam Evaporator |HeaderColor = #F2682A |ImageOne = |ImageTwo = |InstrumentType = Deposition |RoomLocation = B235C Steele |LabPhone = 626-395-1539 |PrimaryStaff = Alex Wertheim |StaffEmail = alexw@caltech.edu |StaffPhone = 626-395-3371 |Manufacturer = AJA International |Model = ATC Orion |Techniques = E-beam Evaporation |EmailList = |EmailListName = }} == De..."

New page

{{InstrumentInfoboxOneImage|
|InstrumentName = AJA Orion ATC Series Electron Beam Evaporator
|HeaderColor = #F2682A
|ImageOne =
|ImageTwo =
|InstrumentType = [[Equipment_List#Deposition|Deposition]]
|RoomLocation = B235C Steele
|LabPhone = 626-395-1539
|PrimaryStaff = [[Alex Wertheim]]
|StaffEmail = alexw@caltech.edu
|StaffPhone = 626-395-3371
|Manufacturer = AJA International
|Model = ATC Orion
|Techniques = E-beam Evaporation
|EmailList =
|EmailListName =
}}
== Description ==

===== Applications =====
* Metal deposition
* Oxide deposition
* Lift-off

== Resources ==
===== Equipment Status =====
* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select AJA Orion E-Beam Evaporator from the dropdown menu)

===== SOPs & Troubleshooting =====
* [linkgoeshere KNI SOP]
* [linkgoeshere Troubleshooting Guide]

=== Tool Reservation Rules ===
{| class="wikitable"
|-
! !! Advanced Reservation (days) !! Limit per Reservation (hrs) !! Limit per week (hrs)
|-
| Weekday || 7 || 6 || 18
|-
| Weeknight || 7 || 8 || 18
|-
| Weekend || 7 || 12 || 18
|}

===== Video Tutorials =====
* [linkgoeshere General System Operation]
* [linkgoeshere In-Situ Crucible Exchange]

== Specifications ==
===== Hardware Specifications =====
* Typical base pressure: <5E-9 Torr
* All dry pumping system (cryo & scroll pumps)
* Load-lock-equipped system with automatic wafer transfer
* Evaporation Source: 1x single emitter, 6-pocket e-beam evaporation source
** Pockets 1-4 allow in-situ crucible exchange through dedicated secondary load lock, allowing for crucible swap without breaking UHV chamber conditions.
* Accepts up to 1x 150mm wafer or smaller wafers/pieces
* Optional lift-off dome holds 4x 100mm wafers for batch processing
* Camera for E-Beam/Crucible observation during process
* Inficon CrystalSix(TM)
** 6-crystal QCM with automatic crystal switching in event of crystal fail or low Q. Enables long periods of maintained UHV conditions without requiring venting to exchange crystals
* Programmable deposition processes

== Related Instrumentation in the KNI ==
===== Sputtering Systems =====
* [[ATC Orion 8: Chalcogenide Sputter System|ATC Orion 8: Chalcogenide Sputter System]]
* [[ATC Orion 8: Dielectric Sputter System|ATC Orion 8: Dielectric Sputter System]]

===== Electron Beam Evaporation Systems =====
* [[CHA: Electron Beam Evaporator|CHA: Electron Beam Evaporator]]

===== Chemical Vapor Deposition =====
* [[FlexAL II: Atomic Layer Deposition (ALD)|FlexAL II: Atomic Layer Deposition (ALD)]]
* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]