The KNI Lab at Caltech - Recent changes [en]

New Members

Tkimoto — Fri, 15 May 2026 19:27:45 GMT

Step 4: Setting Up Your Lab User Accounts & Access

← Older revision		Revision as of 19:27, 15 May 2026
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	==Step 1: Submit Your KNI New User Form==		==Step 1: Submit Your KNI New User Form==
	~~Internal researchers,~~ fill out this online form:		Please fill out this online form:
	* [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form ~~Caltech / JPL Users~~]		* [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form New Member Registration Form]
	External researchers~~, fill out the appropriate form below and email it to [mailto~~:~~kni@caltech.edu kni@caltech.edu], along with a description of your project and the tools you need to use in the KNI Lab. Review~~ the sections below for additional requirements.		External researchers: Please read over the sections below for additional requirements to join the KNI Lab.
	* [https://caltech.box.com/s/26w5srmths37kybjaismwwyc70y1qeiz Non-Caltech Academic or Government Users]
	* [https://caltech.box.com/s/qkoz644x7f77grfgg9fi3wbc0v7j0ogn Industry / Corporate Users]

	==Step 2: Submit Your Process Description Form (if needed)==		==Step 2: Submit Your Process Description Form (if needed)==
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	==Step 3: Safety Training==		==Step 3: Safety Training==
	All new lab users are required to attend the KNI~~-specific lab safety training~~, as well as Caltech's Laboratory Safety Orientation which is managed by Caltech's Environmental Health and Safety (EHS) department.		All new lab users are required to attend the KNI New Member Lab Safety Training Session, as well as Caltech's Laboratory Safety Orientation which is managed by Caltech's Environmental Health and Safety (EHS) department. Caltech EHS Laboratory Safety Orientation is required if you are using '''any''' lab on campus.

	After submitting your new user form, you will receive an email from a KNI ~~staff member~~ with ~~all necessary~~ information to prepare for the KNI-specific safety training session. These sessions are held weekly, every Friday at 1 pm via Zoom.		After submitting your new user form, you will receive an email from the KNI with details and information to prepare for the KNI-specific safety training session. These sessions are held weekly, every Friday at 1 pm via Zoom.

	~~Caltech's~~ EHS Laboratory Safety Orientation ~~is required if you are using any lab on campus. The training~~ is offered ~~by EHS~~ via Zoom twice a month. If you have not taken EHS Lab Safety Orientation, instructions to register for this training can be found here: [https://www.safety.caltech.edu/root-pages/lab-safety-orientation Caltech's EHS Lab Safety Orientation]		EHS Laboratory Safety Orientation is offered via Zoom twice a month. If you have not taken EHS Lab Safety Orientation yet, instructions to register for this training can be found here: [https://www.safety.caltech.edu/root-pages/lab-safety-orientation Caltech's EHS Lab Safety Orientation]

	''Note: You may start and complete KNI safety training before completing the EHS safety training. However, you must complete EHS Laboratory Safety Orientation in order to complete your onboarding and gain access to the KNI Lab.''		''Note: You may start and complete KNI safety training before completing the EHS safety training. However, you '''must''' complete EHS Laboratory Safety Orientation in order to complete your onboarding and gain access to the KNI Lab.''

	==Step 4: Setting Up Your Lab User Accounts & Access==		==Step 4: Setting Up Your Lab User Accounts & Access==
	After you complete the ~~mandatory~~ KNI Lab ~~new user safety training~~, you will receive an email from KNI ~~Administrator Sydney Garstang~~ with further instructions on setting up your KNI Lab user accounts. You will need to coordinate a time to stop by her office and have your ID card scanned so that it is registered in our lab management system. This will allow you to swipe into the KNI Lab's entrance as well as login to the Lab's [https://mh-fbs1.caltech.edu/ tool reservation system (FBS)].		After you complete the KNI Lab New Member Safety Training, you will receive an email from KNI with further instructions on setting up your KNI Lab user accounts. You will need to coordinate a time to stop by her office and have your ID card scanned so that it is registered in our lab management system. This will allow you to swipe into the KNI Lab's entrance as well as login to the Lab's [https://mh-fbs1.caltech.edu/ tool reservation system (FBS)].

	All KNI Lab users are required to join ~~the~~ KNI Lab Slack workspace ~~for~~ timely and important lab updates, ~~as well as~~ FBS, the ~~KNI Lab's~~ user and tool management software system. Be sure to complete your FBS User account activation when you receive the FBS Welcome Email. If you have any trouble logging into our FBS Facility page ("Kavli Nanoscience Institute (KNI"), email kni@caltech.edu.		All KNI Lab users are required to join:

			1. '''KNI Lab Slack workspace''' to keep up with timely and important lab and tool-specific updates, and

			2. '''Priority Software's''' '''FBS platform''', the user and tool management software system for the KNI Laboratory.

			Be sure to complete your FBS User account activation when you receive the FBS Welcome Email. If you have any trouble logging into our FBS Facility page ("Kavli Nanoscience Institute (KNI"), email kni@caltech.edu.

	Read the [https://caltech.box.com/s/vzxxbvgcgh5pijrf77bqga0bv8mzubad FBS User SOP] for instructions on how to request training, schedule & change tool reservations, setting up your User account, notifications, and billing details.		Read the [https://caltech.box.com/s/vzxxbvgcgh5pijrf77bqga0bv8mzubad FBS User SOP] for instructions on how to request training, schedule & change tool reservations, setting up your User account, notifications, and billing details.
			All KNI Lab users are also signed up to the kni-notice email list.

	All KNI Lab users are also ~~signed up~~ to the kni-notice email list.		All KNI Lab users are also added to the kni-notice email list for lab-wide updates.

	==Step 5: Tool-Specific Training==		==Step 5: Tool-Specific Training==
	Requests for specific equipment training must be submitted through the [https://mh-fbs1.caltech.edu/ User Activity Dashboard] in FBS. From the User Dashboard, scroll down to find the name of the tool you need to use, click the "Request Training" link~~, then~~ provide any useful information about why you need ~~training on~~ the ~~specific~~ tool ~~-- also be~~ sure to include your availability for the next two weeks.		Requests for specific equipment training must be submitted through the [https://mh-fbs1.caltech.edu/ User Activity Dashboard] in FBS. From the User Dashboard, scroll down to find the name of the tool you need to use, click the "Request Training" link and provide any useful information about why you need to use the tool. Be sure to include your availability for the next two weeks for staff coordination.

	After you submit your initial training request, the KNI technical staff member in charge of the tool ~~will receive a notification and~~ will contact you to schedule your first training session. Once a day/time has been agreed upon, you ~~make~~ go ~~directly~~ to the FBS Calendar (scheduler) and initiate an "Assisted Use" reservation. The staff member will receive an email notification and approve the reservation.		After you submit your initial tool training request, the KNI technical staff member in charge of the tool will contact you to schedule your first training session. Once a day/time has been agreed upon, you may go to the FBS Calendar (scheduler) and initiate an "Assisted Use" reservation. The staff member will receive an email notification and approve the reservation.

	To schedule additional (second, third, etc.) training sessions, follow the same procedure: first submit the request from the FBS User Dashboard tool list, and after a day/time is set with the staff member, go to the FBS Calendar to initiate an "Assisted Use" reservation for the agreed-upon day/time.		To schedule additional (second, third, etc.) training sessions, follow the same procedure: first submit the request from the FBS User Dashboard tool list, and after a day/time is set with the staff member, go to the FBS Calendar to initiate an "Assisted Use" reservation for the agreed-upon day/time.
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	Additional documents are required to set up an external user's KNI Lab access. Refer to the [https://caltech.box.com/s/urw7mwljz8jxv2d3s036h6kwx2mb8se8 External Lab User Membership Checklist] to ensure timely processing. All documentation must be completed and approved before KNI Lab access is granted.		Additional documents are required to set up an external user's KNI Lab access. Refer to the [https://caltech.box.com/s/urw7mwljz8jxv2d3s036h6kwx2mb8se8 External Lab User Membership Checklist] to ensure timely processing. All documentation must be completed and approved before KNI Lab access is granted.

	If you are interested in joining the KNI Lab as an external user, '''please fill out the ~~online~~ [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form New User Form]'''. ~~Have a~~ purchase order and your CV ~~ready to upload~~.		If you are interested in joining the KNI Lab as an external user, '''please fill out the [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form New User Form]'''. A purchase order and your CV are required.

	'''Note''': all external users are required to hold a formal appointment at Caltech. If you do not have one (e.g. Visitor, External Affiliate, VURP, etc.), KNI will arrange an External Affiliate appointment for you. The appointment process is handled by Caltech HR and goes through reviews by Caltech offices, including Research Security and Compliance. Please be aware that the appointment setup and review process may take a few weeks.		'''Note''': all external users are required to hold a formal appointment at Caltech. If you do not have one (e.g. Visitor, External Affiliate, VURP, etc.), KNI will arrange an External Affiliate appointment for you. The appointment process is handled by Caltech HR and goes through reviews by Caltech offices, including Research Security and Compliance. Please be aware that the appointment setup and review process may take a few weeks.

Full Service Rates

Tkimoto — Tue, 21 Apr 2026 22:44:54 GMT

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-The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. We welcome electron beam lithography requests, in addition to other device fabrication needs. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. This page covers the pricing for external full-service customers. KNI offers no guarantees for the end product.
+The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. We welcome electron beam lithography requests, in addition to other device fabrication needs. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. This page covers the pricing for '''external''' full-service customers. '''Note:''' Internal customers (Caltech/JPL) interested in full-service work: review the details [[Usage Rates|'''here''']]. KNI offers no guarantees for the end product.
 === Why KNI? ===
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 * '''Sensors & MEMS''' — IR detectors, nanoelectromechanical systems, biomedical devices
 * '''Mask fabrication''' — photomask writing for optical lithography step-and-repeat
 === Cost ===
@@ Line 57: / Line 86: @@
 '''''Note:''' The prices shown here include Caltech's indirect cost rate.''
-=== To Get Started ===
+=== How to Get Started ===
 Send an email with your project description and timeline needs to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.

File:Screenshot 2026-04-21 at 3.35.59 PM.png

Tkimoto — Tue, 21 Apr 2026 22:36:58 GMT

Tkimoto uploaded File:Screenshot 2026-04-21 at 3.35.59 PM.png

New page

EBPG system specs

Full Service Rates

Tkimoto — Tue, 21 Apr 2026 22:30:49 GMT

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	The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. We welcome electron beam lithography requests, in addition to other device fabrication needs. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. This page covers the pricing for external full-service customers. Internal customers (Caltech/JPL)~~, please~~ review the details [[Usage Rates\|'''here''']].		The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. We welcome electron beam lithography requests, in addition to other device fabrication needs. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. This page covers the pricing for external full-service customers. KNI offers no guarantees for the end product.

			'''Note:''' Internal customers (Caltech/JPL) interested in full-service work: review the details [[Usage Rates\|'''here''']].

	=== Why KNI? ===		=== Why KNI? ===
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	* '''Mask fabrication''' — photomask writing for optical lithography step-and-repeat		* '''Mask fabrication''' — photomask writing for optical lithography step-and-repeat

	=== ~~'''~~Cost~~'''~~ ===		=== Cost ===
	The prices below are for industry customers (for-profit entities). If you are a non-Caltech academic or government customer, please contact us for the rates. Rates are effective October 1, 2025.		The prices below are for industry customers (for-profit entities). If you are a non-Caltech academic or government customer, please contact us for the rates. Rates are effective October 1, 2025.
	{\| class="wikitable"		{\| class="wikitable"
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	'''''Note:''' The prices shown here include Caltech's indirect cost rate.''		'''''Note:''' The prices shown here include Caltech's indirect cost rate.''

	=== ~~'''~~To ~~get started'''~~ ===		=== To Get Started ===
	Send an email with your project description and timeline needs to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.		Send an email with your project description and timeline needs to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.

Usage Rates

Tkimoto — Tue, 21 Apr 2026 22:29:17 GMT

← Older revision		Revision as of 22:29, 21 April 2026
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	==Full-Service Work Requests ==		==Full-Service Work Requests ==
	KNI lab members and non-lab members can submit a request for full-service work performed by KNI technical staff using KNI equipment. The project will incur costs based on the actual usage of equipment (refer to rates above), as well as ~~charges for~~ the following:		KNI lab members and non-lab members can submit a request for full-service work performed by KNI technical staff using KNI equipment. The project will incur costs based on the actual usage of equipment (refer to rates above), as well as the following. '''Note:''' The rates shown here are the direct costs for internal (Caltech/JPL) customers. Overhead fees will be applied.
	{\| class="wikitable"		{\| class="wikitable"
	\|Fees		\|Fees
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	'''To submit a request for full-service work''', contact the technical staff member in charge of the equipment you are interested in using, or send an email to [mailto:kni@caltech.edu kni@caltech.edu]. Requests will be reviewed and selected based on staff availability, agreement of scope, and turnaround timeline. A PTA must be provided in advance in order for work to begin. KNI offers no guarantees for the end product.		'''To submit a request for full-service work''', contact the technical staff member in charge of the equipment you are interested in using, or send an email to [mailto:kni@caltech.edu kni@caltech.edu]. Requests will be reviewed and selected based on staff availability, agreement of scope, and turnaround timeline. A PTA must be provided in advance in order for work to begin. KNI offers no guarantees for the end product.

	'''~~Note~~:''' ~~The rates above are the direct costs. Overhead fees will be applied.~~		'''External Customers interested in full-service work: [[Full Service Rates\|see the information here]].'''

	==Overhead/Indirect Cost Rate ==		==Overhead/Indirect Cost Rate ==

Full Service Rates

Tkimoto — Tue, 21 Apr 2026 22:25:34 GMT

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	The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff.		The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. We welcome electron beam lithography requests, in addition to other device fabrication needs. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. This page covers the pricing for external full-service customers. Internal customers (Caltech/JPL), please review the details [[Usage Rates\|'''here''']].

	~~KNI welcomes electron beam lithography requests~~, ~~in addition to other device fabrication needs~~.

	=== Why KNI? ===		=== Why KNI? ===
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	=== '''To get started''' ===		=== '''To get started''' ===
	Send an email with your project description and timeline to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.		Send an email with your project description and timeline needs to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.

Full Service Rates

Tkimoto — Tue, 21 Apr 2026 22:23:10 GMT

Created page with "The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff. KNI welcomes electron beam lithography requests, in addition to other device fabrication needs. === Why KNI? === * '''Full process flows:''' resist coating through etch/deposition to final de..."

New page

The KNI Laboratory offers full-service work for internal (Caltech/JPL) customers as well as external customers from industry, government, and academia. Full-service work is project dependent on staff availability, timeline, and scope, and will be reviewed by KNI technical staff.

KNI welcomes electron beam lithography requests, in addition to other device fabrication needs.

=== Why KNI? ===

* '''Full process flows:''' resist coating through etch/deposition to final device, under one roof
* '''Experienced staff:''' fill-time expert engineers managing tools daily
* '''Caltech ecosystem:''' proximity to world-class research in photonics, quantum, and materials
* '''IP-secure:''' NDA option to protect ownership and inventorship rights

=== Application Areas ===

* '''Quantum devices''' — superconducting qubits, ion trap electrodes, single-photon sources
* '''Photonic integrated circuits''' — waveguides, grating couplers, ring resonators, metasurfaces
* '''AR/VR optics''' — diffractive waveguide masters, surface-relief gratings, metalenses
* '''RF & III-V devices''' — HEMT gates, fine-pitch test structures, GaAs/GaN/InP
* '''Sensors & MEMS''' — IR detectors, nanoelectromechanical systems, biomedical devices
* '''Mask fabrication''' — photomask writing for optical lithography step-and-repeat

=== '''Cost''' ===
The prices below are for industry customers (for-profit entities). If you are a non-Caltech academic or government customer, please contact us for the rates. Rates are effective October 1, 2025.
{| class="wikitable"
|'''Resource'''
|'''Hourly Rate (excluding admin fee)'''
|-
|Technical Staff Effort
|$ 200.00
|-
|EBPG 5000+ or 5200
|$ 442.00
|-
|Nova 600 FIB
|$ 255.00
|-
|III-V Cobra ALE Etcher
|$ 204.00
|-
|PlasmaPro PECVD (oxide, nitride)
|$ 204.00
|-
|FlexAL II ALD/ALE
|$ 170.00
|-
|Legacy PlasmaLab PECVD (silicon)
|$ 136.00
|-
|Legacy Oxford Etchers (DRIE, III-V, Dielectric)
|$ 136.00
|-
|Nanoscribe PPGT (2D/3D print)
|$ 17.00
|-
|Administrative Fee (per transaction)
|$ 340.00
|}
'''''Note:''' The prices shown here include Caltech's indirect cost rate.''

=== '''To get started''' ===
Send an email with your project description and timeline to [mailto:kni@caltech.edu kni@caltech.edu]. We will review the request and send a price estimate based on the information provided. We require a purchase order to initiate the full-service work.

Equipment List

Tkimoto — Tue, 21 Apr 2026 22:14:50 GMT

← Older revision		Revision as of 22:14, 21 April 2026
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	* [[ICP-RIE: III-V, Metal & Silicon Etcher \| III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE]]		* [[ICP-RIE: III-V, Metal & Silicon Etcher \| III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE]]
	* [[ICP-RIE: Dielectric Etcher \| Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE]]		* [[ICP-RIE: Dielectric Etcher \| Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE]]
	* [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher \| Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE]]		<!---* [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher \| Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE]]--->
	* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner \| Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE]]		* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner \| Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE]]
	* [[XeF2 Etcher for Silicon \| XeF<sub>2</sub> Etcher for Silicon]]		* [[XeF2 Etcher for Silicon \| XeF<sub>2</sub> Etcher for Silicon]]

MediaWiki:Sidebar

Tkimoto — Tue, 21 Apr 2026 21:54:46 GMT

← Older revision		Revision as of 21:54, 21 April 2026
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	* navigation		* navigation
	** Lab Rules & Safety\|Lab Rules & Safety		** Lab Rules & Safety\|Lab Rules & Safety
	** KNI Staff Members\|KNI Staff Members
	** Equipment List\|Equipment List		** Equipment List\|Equipment List
	** Lab Phone List\|Lab Phone List		** Lab Phone List\|Lab Phone List
			** KNI Staff Members\|KNI Staff List
	** New Members\|Join the KNI Lab		** New Members\|Join the KNI Lab
	<!-- ** Email Lists\|Email Lists -->		<!-- ** Email Lists\|Email Lists -->
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	** FBS Instructions\|FBS Instructions		** FBS Instructions\|FBS Instructions
	<!-- ** https://indd.adobe.com/view/9dce971e-6115-443a-866b-61ad8e744e68\|Cleanroom Info Booklet -->		<!-- ** https://indd.adobe.com/view/9dce971e-6115-443a-866b-61ad8e744e68\|Cleanroom Info Booklet -->
	** Acknowledge the KNI\|Acknowledge the KNI		** Acknowledge the KNI\|Acknowledge the KNI & Logo
	** Acknowledge the KNI\|KNI Logo
	** Directions to the KNI Lab\|Directions to the KNI		** Directions to the KNI Lab\|Directions to the KNI

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	** Usage Rates\|Usage Rates		** Usage Rates\|Usage Rates
	** New Members\|Join the KNI Lab		** New Members\|Join the KNI Lab
			** Full Service Rates\|Full Service Rates
	** https://caltech.box.com/s/cqqpgx4jolgvw76n03rjaxahmj4003wb\|KNI Lab Process Sheet		** https://caltech.box.com/s/cqqpgx4jolgvw76n03rjaxahmj4003wb\|KNI Lab Process Sheet
	** https://mh-fbs1.caltech.edu/Anon/Logon.aspx \| FBS Sign-In		** https://mh-fbs1.caltech.edu/Anon/Logon.aspx \| FBS Sign-In

New Members

Tkimoto — Mon, 20 Apr 2026 22:10:07 GMT

Step 1: Submit Your KNI New User Form

← Older revision		Revision as of 22:10, 20 April 2026
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	Internal researchers, fill out this online form:		Internal researchers, fill out this online form:
	* [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form Caltech / JPL Users]		* [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form Caltech / JPL Users]
	External researchers, fill out the appropriate form below and email it to [mailto:kni@caltech.edu kni@caltech.edu]. Review the sections below for additional requirements.		External researchers, fill out the appropriate form below and email it to [mailto:kni@caltech.edu kni@caltech.edu], along with a description of your project and the tools you need to use in the KNI Lab. Review the sections below for additional requirements.
	* [https://caltech.box.com/s/26w5srmths37kybjaismwwyc70y1qeiz Non-Caltech Academic or Government Users]		* [https://caltech.box.com/s/26w5srmths37kybjaismwwyc70y1qeiz Non-Caltech Academic or Government Users]
	* [https://caltech.box.com/s/qkoz644x7f77grfgg9fi3wbc0v7j0ogn Industry / Corporate Users]		* [https://caltech.box.com/s/qkoz644x7f77grfgg9fi3wbc0v7j0ogn Industry / Corporate Users]

← Older revision		Revision as of 22:14, 21 April 2026
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	* [[ICP-RIE: III-V, Metal & Silicon Etcher \| III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE]]		* [[ICP-RIE: III-V, Metal & Silicon Etcher \| III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE]]
	* [[ICP-RIE: Dielectric Etcher \| Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE]]		* [[ICP-RIE: Dielectric Etcher \| Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE]]
	* [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher \| Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE]]		<!---* [[Dual Chamber RIE: Silicon, III-V Material & Organics Etcher \| Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE]]--->
	* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner \| Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE]]		* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner \| Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE]]
	* [[XeF2 Etcher for Silicon \| XeF<sub>2</sub> Etcher for Silicon]]		* [[XeF2 Etcher for Silicon \| XeF<sub>2</sub> Etcher for Silicon]]

← Older revision		Revision as of 21:54, 21 April 2026
(One intermediate revision by the same user not shown)
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	* navigation		* navigation
	** Lab Rules & Safety\|Lab Rules & Safety		** Lab Rules & Safety\|Lab Rules & Safety
	** KNI Staff Members\|KNI Staff Members
	** Equipment List\|Equipment List		** Equipment List\|Equipment List
	** Lab Phone List\|Lab Phone List		** Lab Phone List\|Lab Phone List
			** KNI Staff Members\|KNI Staff List
	** New Members\|Join the KNI Lab		** New Members\|Join the KNI Lab
	<!-- ** Email Lists\|Email Lists -->		<!-- ** Email Lists\|Email Lists -->
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	** FBS Instructions\|FBS Instructions		** FBS Instructions\|FBS Instructions
	<!-- ** https://indd.adobe.com/view/9dce971e-6115-443a-866b-61ad8e744e68\|Cleanroom Info Booklet -->		<!-- ** https://indd.adobe.com/view/9dce971e-6115-443a-866b-61ad8e744e68\|Cleanroom Info Booklet -->
	** Acknowledge the KNI\|Acknowledge the KNI		** Acknowledge the KNI\|Acknowledge the KNI & Logo
	** Acknowledge the KNI\|KNI Logo
	** Directions to the KNI Lab\|Directions to the KNI		** Directions to the KNI Lab\|Directions to the KNI

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	** Usage Rates\|Usage Rates		** Usage Rates\|Usage Rates
	** New Members\|Join the KNI Lab		** New Members\|Join the KNI Lab
			** Full Service Rates\|Full Service Rates
	** https://caltech.box.com/s/cqqpgx4jolgvw76n03rjaxahmj4003wb\|KNI Lab Process Sheet		** https://caltech.box.com/s/cqqpgx4jolgvw76n03rjaxahmj4003wb\|KNI Lab Process Sheet
	** https://mh-fbs1.caltech.edu/Anon/Logon.aspx \| FBS Sign-In		** https://mh-fbs1.caltech.edu/Anon/Logon.aspx \| FBS Sign-In