2026-04-14T18:36:29Z

Tkimoto:

{{InstrumentInfoboxOneImage|
|InstrumentName = Wafer Bonder
|HeaderColor = #E6E7E8
|ImageOne = Wafer-Bonder_Suss-SB6L.jpg
|ImageTwo =
|InstrumentType = [[Equipment_List#Support_Tools|Support Tools]], [[Equipment_List#Substrate_Processing|Substrate Processing]]
|RoomLocation = B217 Steele
|LabPhone = 626-395-4075
|PrimaryStaff = [[Nathan S. Lee]]
|StaffEmail = nathslee@caltech.edu
|StaffPhone = 626-395-4386
|Manufacturer = Suss Microtec
|Model = SBL6
|Techniques = Pressure/Heat Bonding
|RequestTraining = nathslee@caltech.edu
|EmailList = kni-sb6l
|EmailListName = Wafer Bonder
}}
== Description ==
The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber in order to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp & duration of any process step. Since heat and temperature can be controlled separately, temperature-sensitive materials such as polymers may be bonded.
===== Applications =====
* MEMS & Microelectronics Fabrication

== Resources ==
===== SOPs =====
* [https://caltech.box.com/s/jwm9iw0t64s7sznmzwjs32zjdjownts7 KNI SB6L SOP] - Operating Instructions for the Suss SB6L Wafer Bonder

===== Manufacturer Manuals =====
* [https://caltech.box.com/s/je95chbsbq3u14f3jchch4l79itshtb5 SB6L User Manual] - The SUSS SB6L Wafer Bonder System User Manual
* [https://caltech.box.com/s/fiy5cjzv01tf7b1vglc1nl0iv4uidgmp NP12 User Manual] - The SUSS NP 12™ Plasma Activation System User Manual
* [https://caltech.box.com/s/7pj89gepa98exkv7gyy3hmzs0gv3jo72 Suss Micro Tec Process Manual] -The Wafer Bonding Process Manual contains information on the different types of substrate bonding applications.

Wafer Bonder

2026-04-14T18:36:00Z

Tkimoto:

{{InstrumentInfoboxOneImage|
|InstrumentName = Wafer Bonder
|HeaderColor = #E6E7E8
|ImageOne = Wafer-Bonder_Suss-SB6L.jpg
|ImageTwo =
|InstrumentType = [[Equipment_List#Support_Tools|Support Tools]], [[Equipment_List#Substrate_Processing|Substrate Processing]]
|RoomLocation = B217 Steele
|LabPhone = 626-395-4075
|PrimaryStaff = [[Nathan Lee]]
|StaffEmail = nathslee@caltech.edu
|StaffPhone = 626-395-4386
|Manufacturer = Suss Microtec
|Model = SBL6
|Techniques = Pressure/Heat Bonding
|RequestTraining = nathslee@caltech.edu
|EmailList = kni-sb6l
|EmailListName = Wafer Bonder
}}
== Description ==
The SB6L wafer bonder applies force and heat to the back side of two wafers in a vacuum chamber in order to bond them face to face. An automatic recipe can be created with control over bonding pressure, temperature, and chamber pressure as well as ramp & duration of any process step. Since heat and temperature can be controlled separately, temperature-sensitive materials such as polymers may be bonded.
===== Applications =====
* MEMS & Microelectronics Fabrication

== Resources ==
===== SOPs =====
* [https://caltech.box.com/s/jwm9iw0t64s7sznmzwjs32zjdjownts7 KNI SB6L SOP] - Operating Instructions for the Suss SB6L Wafer Bonder

===== Manufacturer Manuals =====
* [https://caltech.box.com/s/je95chbsbq3u14f3jchch4l79itshtb5 SB6L User Manual] - The SUSS SB6L Wafer Bonder System User Manual
* [https://caltech.box.com/s/fiy5cjzv01tf7b1vglc1nl0iv4uidgmp NP12 User Manual] - The SUSS NP 12™ Plasma Activation System User Manual
* [https://caltech.box.com/s/7pj89gepa98exkv7gyy3hmzs0gv3jo72 Suss Micro Tec Process Manual] -The Wafer Bonding Process Manual contains information on the different types of substrate bonding applications.

New Members

2026-04-02T20:20:11Z

Tkimoto: /* Step 1: Submit Your KNI New User Form */

==Joining the KNI Lab==
The KNI Laboratory (KNI Lab) is an open-access facility for Caltech and JPL students and researchers, as well as external academic, government and industry users. Equipment and resource use is billed on a per hour basis. Customers are invoiced monthly for their use. You can find information on our [[Usage_Rates | usage rates here]].

If you have general process questions or technical questions about KNI Lab resources, please email Associate Director of Technical Operations [mailto:derose@caltech.edu Dr. Guy DeRose]. Provide as much detail as possible to ensure an efficient and timely response.

Note: There are additional requirements for external users to join the KNI Lab (see below). Please allow more time for processing.

==Step 1: Submit Your KNI New User Form==
Internal researchers, fill out this online form:
* [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form Caltech / JPL Users]
External researchers, fill out the appropriate form below and email it to [mailto:kni@caltech.edu kni@caltech.edu]. Review the sections below for additional requirements.
* [https://caltech.box.com/s/26w5srmths37kybjaismwwyc70y1qeiz Non-Caltech Academic or Government Users]
* [https://caltech.box.com/s/qkoz644x7f77grfgg9fi3wbc0v7j0ogn Industry / Corporate Users]

==Step 2: Submit Your Process Description Form (if needed)==
After you have submitted your new user form, you may contact [mailto:derose@caltech.edu Guy DeRose] for general process questions. Attach the
[https://caltech.box.com/s/kxkb44hdjhkw8rbj3pl9v6lh29h6b166 KNI Lab New Process Description form] to your email inquiry.

==Step 3: Safety Training==
All new lab users are required to attend the KNI-specific lab safety training, as well as Caltech's Laboratory Safety Orientation which is managed by Caltech's Environmental Health and Safety (EHS) department.

After submitting your new user form, you will receive an email from a KNI staff member with all necessary information to prepare for the KNI-specific safety training session. These sessions are held weekly, every Friday at 1 pm via Zoom.

Caltech's EHS Laboratory Safety Orientation is required if you are using any lab on campus. The training is offered by EHS via Zoom twice a month. If you have not taken EHS Lab Safety Orientation, instructions to register for this training can be found here: [https://www.safety.caltech.edu/root-pages/lab-safety-orientation Caltech's EHS Lab Safety Orientation]

''Note: You may start and complete KNI safety training before completing the EHS safety training. However, you must complete EHS Laboratory Safety Orientation in order to complete your onboarding and gain access to the KNI Lab.''

==Step 4: Setting Up Your Lab User Accounts & Access==
After you complete the mandatory KNI Lab new user safety training, you will receive an email from KNI Administrator Sydney Garstang with further instructions on setting up your KNI Lab user accounts. You will need to coordinate a time to stop by her office and have your ID card scanned so that it is registered in our lab management system. This will allow you to swipe into the KNI Lab's entrance as well as login to the Lab's [https://mh-fbs1.caltech.edu/ tool reservation system (FBS)].

All KNI Lab users are required to join the KNI Lab Slack workspace for timely and important lab updates, as well as FBS, the KNI Lab's user and tool management software system. Be sure to complete your FBS User account activation when you receive the FBS Welcome Email. If you have any trouble logging into our FBS Facility page ("Kavli Nanoscience Institute (KNI"), email kni@caltech.edu.

Read the [https://caltech.box.com/s/vzxxbvgcgh5pijrf77bqga0bv8mzubad FBS User SOP] for instructions on how to request training, schedule & change tool reservations, setting up your User account, notifications, and billing details.

All KNI Lab users are also signed up to the kni-notice email list.

==Step 5: Tool-Specific Training==
Requests for specific equipment training must be submitted through the [https://mh-fbs1.caltech.edu/ User Activity Dashboard] in FBS. From the User Dashboard, scroll down to find the name of the tool you need to use, click the "Request Training" link, then provide any useful information about why you need training on the specific tool -- also be sure to include your availability for the next two weeks.

After you submit your initial training request, the KNI technical staff member in charge of the tool will receive a notification and will contact you to schedule your first training session. Once a day/time has been agreed upon, you make go directly to the FBS Calendar (scheduler) and initiate an "Assisted Use" reservation. The staff member will receive an email notification and approve the reservation.

To schedule additional (second, third, etc.) training sessions, follow the same procedure: first submit the request from the FBS User Dashboard tool list, and after a day/time is set with the staff member, go to the FBS Calendar to initiate an "Assisted Use" reservation for the agreed-upon day/time.

Refer to our [https://lab.kni.caltech.edu/Equipment_List Equipment List] page for details on all of the resources in the KNI Lab.

''Note: Users are only charged for equipment use time during training sessions. There is no additional fee (i.e. staff time) for training sessions.''

==External Users==
Non-Caltech Academic, Government, and For-profit/Commercial researchers are considered external users.

Additional documents are required to set up an external user's KNI Lab access. Refer to the [https://caltech.box.com/s/urw7mwljz8jxv2d3s036h6kwx2mb8se8 External Lab User Membership Checklist] to ensure timely processing. All documentation must be completed and approved before KNI Lab access is granted.

If you are interested in joining the KNI Lab as an external user, '''please fill out the online [https://airtable.com/app2vjzgp8AJpuC3A/pagHxiNohQX8G65DZ/form New User Form]'''. Have a purchase order and your CV ready to upload.

'''Note''': all external users are required to hold a formal appointment at Caltech. If you do not have one (e.g. Visitor, External Affiliate, VURP, etc.), KNI will arrange an External Affiliate appointment for you. The appointment process is handled by Caltech HR and goes through reviews by Caltech offices, including Research Security and Compliance. Please be aware that the appointment setup and review process may take a few weeks.

If you have any questions, please contact kni@caltech.edu.

==KNI Member Offboarding==
Users who no longer need to use the KNI Lab must send a notification email to [mailto:kni@caltech.edu kni@caltech.edu] and complete the offboarding process before their last day. Please review the [https://caltech.box.com/s/qapv4ytu4uhyszz538rz4k55mvdihyix KNI Member Offboarding SOP]. The SOP lists items such as Stored Items, Chemicals, Stored Data/Files, etc, which should to be addressed before your membership ends.